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This section provides an overview for microfabrication machines as well as their applications and principles. Also, please take a look at the list of 8 microfabrication machine manufacturers and their company rankings. Here are the top-ranked microfabrication machine companies as of December, 2024: 1.Kyodo International, Inc., 2.Hikari Kikai Seisakusho Co., Ltd., 3.Central Mechanical Engineering Research Institute.
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Categories Related to Microfabrication Machines
A microfabrication machine is a processing machine that performs micron-level microfabrication. They are not limited to processing metals, but also process resins, polymers, and inorganic materials.
In recent years, there are cutting machines that can be programmed and controlled at the 10-nm level, and the scale of microfabrication is advancing daily.
Microfabrication machines in the broad sense of the term also include electric discharge machines, wire EDMs, jig borers, and laser cutting machines. In handling these microfabrication machines, temperature control such as room temperature and operator skill are also very important.
In recent years, microfabrication technology has become necessary in all industrial fields and is used in a wide range of applications.
In the semiconductor and electronic components industries, it is essential for processing package molds and various parts as devices become finer and finer, and in the medical equipment industry, it is essential for parts with micro flow paths such as biochips and parts with fine electrode structures.
It is possible to realize microstructures that cannot be machined with conventional end mills, such as heat dissipating fins with extremely small pitch, holes with micron-order pitch, and projection array structures with submicron-order pitch.
Microfabrication machines, in the broad sense, encompass multiple types of machines, but there are three representative types of machines. There are microfabrication machines, electrical discharge machines, and wire EDM machines, each of which has different principles.
Although the basic structure and principles are much the same as those of conventional NC machining centers, high-precision control is applied to all aspects of the machine, including the drive method for each axis, coolant temperature control, and rotation speed control.
Linear motors are used to drive each axis, and some products have a programmed resolution of 0.1 nm. Hydrostatic guiding is used for the guides that control the reciprocating motion, which enables infinitely low frictional resistance and high motion accuracy.
Coolant, which manages the heat generated during processing, is temperature-controlled at the 1/100°C level, and to block various vibrations transmitted from outdoors, anti-vibration measures are taken from the building foundation structure, or the building is installed on a vibration isolation system. In addition, the coolant is installed in a constant-temperature room to prevent thermal expansion of the equipment.
For microfabrication of conductive materials, an electric discharge machine with an anode connected to the material side and a cathode connected to the movable electrode is used. This technology of machining with direct current is used for materials and shapes that are susceptible to machining strain from cutting and polishing, and enables higher precision and surface roughness through repeated machining.
The basic principle is the same as that of EDM, but a cathode is connected to a very thin wire of about 0.05 to 0.3 mm, and a DC current is applied between the wire and the material to cut the material. Processing is performed in water with controlled conductivity, and the wire is constantly fed during processing. Since the cutting is done in a non-contact, stroke-by-stroke manner, no processing stress is generated. It is possible to cut a wire thickness plus 20 to 30 microns.
Machines used in combination with microfabrication machines require a high degree of precision and stability. In order to support microfabrication, the machine itself must be highly accurate and the machining conditions must be set appropriately. It is necessary to understand the characteristics of each machine and select the optimum machine.
Here, we introduce three types of typical machines used in conjunction with microfabrication machines: laser cutting machines, electron beam machines, and ion beam machines.
*Including some distributors, etc.
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Hikari Kikai Seisakusho Co., Ltd., established in 1959 and headquartered in Tsu, Mei, Japan, is a manufacturer of precision machinery and cutting tools. Its product range includes a grinding machine for PCD tool tips, single-disk grinding machine, brush-honing machine, and double-disc surface grinding machine. Its integrated production system from design to final product, covers various stages, including processes like cutting, deep hole machining, heat treatment, plating, and coating. The company holds JIS9001:2015 (ISO:2015) certification for quality management and standards in its manufacturing operations.
TDC CO., LTD., established in 1989 and headquartered in Miyagi, Japan, is a manufacturer that specializes in precision technologies. It employs polishing and lapping technology capable of achieving ultra-fine specifications, even for materials with surface roughness as low as Ra1 nanometer. It specializes in achieving sub-micron level super fine flatness, parallelism, and size tolerance, all while accommodating multiple requirements. The company processes various materials, including metals, ceramics, glasses, and semiconductor materials. The company has created precision-finished surface plates, precision machining of XY stage spindles, precision feed rails, positioning jigs, and glass scales for encoders, leveraging precision dimensional control technology.
Towa Corporation, established in 1979 in Kyoto, Japan, is a manufacturer of semiconductor molding equipment and precision molds. The company manufactures various semiconductor precision molds, equipment, and fine plastic molded parts. Products include molding equipment, singulation equipment, ultra-precision molds, end mills, and drill series for use in mainly industrial applications. They make fingerprint sensors, floating image technology, and head-up displays as well. These are used for multiple packaging purposes, including leadframe ICs, transistors, and diodes. Their proprietary transfer folding method and resin molding technique ensure the semiconductor molds are temperature- and chemical-resistant, offering immense performance with leakproof and resilient properties.
Advanced Micro-Fabrication Equipment Inc., founded in 2004 and headquartered in Shanghai, China, is an ISO 9001 and ISO 45001-certified manufacturer of micro-fabrication equipment. The company supplies dielectric and TSV etch tools that help chipmakers with chip processing. Its MOCVD tools are used in volume production by LED manufacturers, and it also produces industrial volatile organic compound purifiers and eco-friendly local scrubbers that are used to treat exhaust gases generated from the manufacturing of semiconductors. It has over 80 honorary awards, and as of 2019, the company had been granted over 900 patents in China and overseas.
Kyodo International, Inc. established in 1970 and based in Kawasaki-shi, Japan, is a manufacturer and distributor of microfabrication tools and equipment. The company's product range includes deposition tools, photolithography equipment, etching machines, CMP processing units, and nanoimprinting tools. These products are used for the development and manufacturing of electronic components and systems. The company serves industries such as electronics manufacturing, microelectromechanical systems (MEMS) production, and life sciences, it ensures the delivery of high-precision tools for intricate manufacturing processes. Its services span the sale, repair, and overhaul of consumable parts.
Tokyo Instruments, Inc., established in 1981, and headquartered in Tokyo, Japan, is a manufacturer of opto-electronics products and systems. The company offers a wide range of products, including laser processing machines, aligning systems, photodetectors, analyzers for photoelectron spectroscopy, and spectroscopy array detectors. Also offered are high-speed, high-sensitivity cameras in UV to IR, and photon detectors or counters. The company's product families consist of the Nanofinder series of 3D Laser Raman Microspectroscopy systems and the iDus Workhorse laboratory and OEM CCD platform for low-light spectroscopy.
Ranking as of December 2024
Derivation Method| Rank | Company | Click Share |
|---|---|---|
| 1 | Kyodo International, Inc. |
35.5%
|
| 2 | Hikari Kikai Seisakusho Co., Ltd. |
19.4%
|
| 3 | Central Mechanical Engineering Research Institute |
9.7%
|
| 4 | NC network co.,Ltd. |
9.7%
|
| 5 | Advanced Micro-Fabrication Equipment Inc. |
9.7%
|
| 6 | TDC CO., LTD. |
6.5%
|
| 7 | TOWA Corporation |
6.5%
|
| 8 | Tokyo Instruments, Inc |
3.2%
|
Derivation Method
The ranking is calculated based on the click share within the microfabrication machine page as of December 2024. Click share is defined as the total number of clicks for all companies during the period divided by the number of clicks for each company.Number of Employees
Newly Established Company
Company with a History
*Including some distributors, etc.
| Country | Number of Companies | Share (%) |
|---|---|---|
|
Japan
|
6 | 85.7% |
India
|
1 | 14.3% |
8 products found
8 products
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2,770 micro holes, continuous machining for 4 hours and 21 minutes. ■Main features ・Workpiece material: SKH2 ・Processed plate thickness: 0.5mm ...
2 models listed
