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  4. Quark UV irradiation device Excimer Lamp 172nm excimer irradiation device flat type (TAZMO CO.,LTD.)
Quark UV irradiation device Excimer Lamp 172nm excimer irradiation device flat type-QEF-300SPC
Quark UV irradiation device Excimer Lamp 172nm excimer irradiation device flat type-TAZMO CO.,LTD.

Quark UV irradiation device Excimer Lamp 172nm excimer irradiation device flat type
TAZMO CO.,LTD.

About This Product

■Application example

・Static charge removal before photomask inspection ・Wafer static elimination (circuit damage prevention) ・Glass surface organic substance removal (dry cleaning) ・Surface modification before coating (improved adhesion) ・Surface modification before plating (fine plating penetration) ・Pre-treatment for bonding electronic boards (improving adhesion) ・What is an excimer lamp? An excimer lamp is a light source that can emit vacuum ultraviolet light, with a light emitting principle and structure different from conventional discharge lamps (mercury lamps, xenon lamps, etc.). Excimer lamps generate vacuum ultraviolet light (VUV) with a wavelength of 172 nm, which has higher photon energy than the mercury lamps (wavelengths of 185 nm and 254 nm) used in conventional photocleaning and modification. It can turn on and off instantly and does not require idling. ・Damageless surface treatment 172nm (vacuum ultraviolet light) with high photon energy efficiently breaks carbon bonds and generates active oxygen and ozone, allowing surface treatment without causing damage. ・High illumination and high uniformity The unique technology of the "flat type" that emits light from the entire surface allows the entire surface of the workpiece to be irradiated at once. By irradiating the entire surface, it is possible to achieve uniform irradiation with high illuminance and no uneven irradiation.

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    Quark UV irradiation device Excimer Lamp 172nm excimer irradiation device flat type

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1 Models of Quark UV irradiation device Excimer Lamp 172nm excimer irradiation device flat type

Image Part Number Price (excluding tax) Illuminance (maximum window surface) Irradiation aperture Wavelength Compatible work size Distribution Utility
Quark UV irradiation device Excimer Lamp 172nm excimer irradiation device flat type-Part Number-QEF-300SPC

QEF-300SPC

Available upon quote

80mW/cm²

Φ332mm

172nm

12inch

±5%

N2/cooling water/AC100~240V

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About Company Handling This Product

TAZMO CO.,LTD.

Company Overview

TAZMO CO., LTD., founded in 1972 and based in Okayama, Japan, is a manufacturer and distributor of advanced ma...

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  • Japan

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UV Curing Systems
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