Quark UV irradiation device Excimer Lamp 172nm excimer irradiation device flat type
TAZMO CO.,LTD.
About This Product
■Application example
・Static charge removal before photomask inspection
・Wafer static elimination (circuit damage prevention)
・Glass surface organic substance removal (dry cleaning)
・Surface modification before coating (improved adhesion)
・Surface modification before plating (fine plating penetration)
・Pre-treatment for bonding electronic boards (improving adhesion)
・What is an excimer lamp?
An excimer lamp is a light source that can emit vacuum ultraviolet light, with a light emitting principle and structure different from conventional discharge lamps (mercury lamps, xenon lamps, etc.). Excimer lamps generate vacuum ultraviolet light (VUV) with a wavelength of 172 nm, which has higher photon energy than the mercury lamps (wavelengths of 185 nm and 254 nm) used in conventional photocleaning and modification. It can turn on and off instantly and does not require idling.
・Damageless surface treatment
172nm (vacuum ultraviolet light) with high photon energy efficiently breaks carbon bonds and generates active oxygen and ozone, allowing surface treatment without causing damage.
・High illumination and high uniformity
The unique technology of the "flat type" that emits light from the entire surface allows the entire surface of the workpiece to be irradiated at once. By irradiating the entire surface, it is possible to achieve uniform irradiation with high illuminance and no uneven irradiation.
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Product
Quark UV irradiation device Excimer Lamp 172nm excimer irradiation device flat type
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Handling Company
TAZMO CO.,LTD.
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Categories
1 Models of Quark UV irradiation device Excimer Lamp 172nm excimer irradiation device flat type
| Product Image | Part Number | Price (excluding tax) | Compatible work size | Distribution | Illuminance (maximum window surface) | Irradiation aperture | Utility | Wavelength |
|---|---|---|---|---|---|---|---|---|
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QEF-300SPC |
Available upon quote | 12inch | ±5% | 80mW/cm² | Φ332mm | N2/cooling water/AC100~240V | 172nm |
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About Company Handling This Product
- Japan