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  4. Clean conveyance system Pre-Liner Compatible with compounds and glass Edge hold type MAF-S series (TAZMO CO.,LTD.)
Clean conveyance system Pre-Liner Compatible with compounds and glass Edge hold type MAF-S series-MAF-SHKZ
Clean conveyance system Pre-Liner Compatible with compounds and glass Edge hold type MAF-S series-TAZMO CO.,LTD.

Clean conveyance system Pre-Liner Compatible with compounds and glass Edge hold type MAF-S series
TAZMO CO.,LTD.

About This Product

This is a 300mm mechanical clamp aligner that minimizes particle contamination to the wafer with non-contact backside.

■Product features

- Compatible with compound semiconductors and glass. ・Clean alignment is achieved by contacting the wafer with only the end surface. - Since the type of notch and orientation flat is automatically identified, no settings are required from the host controller. - Compact design with built-in controller.

  • Product

    Clean conveyance system Pre-Liner Compatible with compounds and glass Edge hold type MAF-S series

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1 Models of Clean conveyance system Pre-Liner Compatible with compounds and glass Edge hold type MAF-S series

Image Part Number Price (excluding tax) Applicable work Communication specifications Mass Processing accuracy Processing time Processable range Utility Wafer holding confirmation Wafer holding method
Clean conveyance system Pre-Liner Compatible with compounds and glass Edge hold type MAF-S series-Part Number-MAF-SHKZ

MAF-SHKZ

Available upon quote

Φ300mmSEMI/JEIDA standard wafer

RS-232C (serial communication)

Body: Approximately 8kg

Θ8: Within ±0.2° (3σ)

Within 8.0 seconds (without changing hands) Within 20.0 seconds (with changing hands)

Within ±1mm (wafer center deviation amount)

Power supply: DC24V±10% 3A 1 system Dry air: Φ6mm 0.35MPa ~ 0.4MP a1 system

Photo micro sensor

Edge hold

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About Company Handling This Product

TAZMO CO.,LTD.

Company Overview

TAZMO CO., LTD., founded in 1972 and based in Okayama, Japan, is a manufacturer and distributor of advanced ma...

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  • Japan

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