Clean conveyance system Pria Liner Compatible with compounds and glass Back side adsorption type MAF-RA series-MAF-RAPN

Clean conveyance system Pria Liner Compatible with compounds and glass Back side adsorption type MAF-RA series
TAZMO CO.,LTD.

About This Product

This product is a unit that performs high-speed, non-contact, orientation flat alignment centering of wafers.

■Product features・Wafer centering and angle adjustment can be performed without changing hands, resulting in high-speed processing.
・Multi-compatible with SEMI/JEIDA silicon wafers of Φ200mm to Φ300mm.
・Since the wafer size and type of notch/orientation flat are automatically recognized, no settings are required from the host controller.
-Compact design with built-in controller.
- Can be controlled by serial communication using RS-232C or RS-485, or parallel communication using photo I/O.
・A CCD type light receiving element is used in the line sensor to achieve alignment of transparent glass and compound semiconductors.

Model
There are 1 models for this product.

Product
Clean conveyance system Pria Liner Compatible with compounds and glass Back side adsorption type MAF-RA series

Handling Company
TAZMO CO.,LTD.

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1 Models of Clean conveyance system Pria Liner Compatible with compounds and glass Back side adsorption type MAF-RA series

Image	Part Number	Price (excluding tax)	Applicable work	Communication specifications	Mass	Processing accuracy	Processing time	Processable range	Utility	Wafer holding confirmation	Wafer holding method
	MAF-RAPN	Available upon quote	Please contact us for special products such as Φ200mm~Φ300mm SEMI/JEIDA standard wafer glass wafer.	RS-232C, RS-485 (serial communication) Photo I/O (parallel communication)	Body: Approximately 12kg	XY: Within ±0.1mm (3g) 8: Within ±0.1° (30)	Within 4.5 seconds (when processing 300mm)	Within 5mm (wafer center deviation)	Power supply: DC24V±10% 5A 1 system Vacuum: -80kPa or less 1 system	Vacuum sensor with digital display	Vacuum adsorption

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About Company Handling This Product

TAZMO CO.,LTD.

Company Overview

TAZMO CO., LTD., founded in 1972 and based in Okayama, Japan, is a manufacturer and distributor of advanced ma...

Japan

Clean conveyance system Pria Liner Compatible with compounds and glass Back side adsorption type MAF-RA series TAZMO CO.,LTD.

About This Product

■Product features

1 Models of Clean conveyance system Pria Liner Compatible with compounds and glass Back side adsorption type MAF-RA series

MAF-RAPN

Customers who viewed this product also viewed

Other products of TAZMO CO.,LTD.

About Company Handling This Product

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Clean conveyance system Pria Liner Compatible with compounds and glass Back side adsorption type MAF-RA series
TAZMO CO.,LTD.