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  4. Clean conveyance system Atmospheric conveyance robot Stepping motor specification Free access robot (TAZMO CO.,LTD.)
Clean conveyance system Atmospheric conveyance robot Stepping motor specification Free access robot-MTSR-3
Clean conveyance system Atmospheric conveyance robot Stepping motor specification Free access robot-TAZMO CO.,LTD.

Clean conveyance system Atmospheric conveyance robot Stepping motor specification Free access robot
TAZMO CO.,LTD.

About This Product

This product is a transfer robot compatible with Φ300mm wafers.

■Product features

・Mapping sensors are also available. ・The optimal turning space has been achieved using the optimal software, and the built-in controller has realized space savings.

  • Product

    Clean conveyance system Atmospheric conveyance robot Stepping motor specification Free access robot

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1 Models of Clean conveyance system Atmospheric conveyance robot Stepping motor specification Free access robot

Image Part Number Price (excluding tax) Weight Applicable work Repeatability Operating range Control method Utility Wafer grip confirmation Wafer gripping method
Clean conveyance system Atmospheric conveyance robot Stepping motor specification Free access robot-Part Number-MTSR-3

MTSR-3

Available upon quote

Body: Approx. 35kg

Φ100mm~Φ300mmSEMI/JEITA standard product wafer

X,Y direction: ±0.1mm (30) Z axis: ±0.05mm (30)

R axis: 374mm (maximum arm reach) T axis: 370deg (origin: ±185deg) Z axis: 380mm

RS232C, RS-485

Power supply: Drive DC24V±5% 10A Control DC24V±5% 3.15A Vacuum: -80kP a or less 15L/min or more 1 system (Φ6×Φ4 polyurethane tube one-touch joint connection)

Vacuum sensor with digital display

Back side vacuum adsorption/drop-in/edge grip/Bernoulli

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About Company Handling This Product

TAZMO CO.,LTD.

Company Overview

TAZMO CO., LTD., founded in 1972 and based in Okayama, Japan, is a manufacturer and distributor of advanced ma...

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  • Japan

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Transfer Machinery　TAZMO CO.,LTD.
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