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  4. Clean conveyance system Atmospheric conveyance robot Servo motor specification Free access robot (TAZMO CO.,LTD.)
Clean conveyance system Atmospheric conveyance robot Servo motor specification Free access robot-MTE-E
Clean conveyance system Atmospheric conveyance robot Servo motor specification Free access robot-TAZMO CO.,LTD.

Clean conveyance system Atmospheric conveyance robot Servo motor specification Free access robot
TAZMO CO.,LTD.

About This Product

This product is a transfer robot compatible with Φ300mm wafers. This is the flagship model of Tatsumo's transport robot, which achieves high-speed transport and high cleanliness.

■Product features

- Compatible with 3FOUP without rails. ・The changer mechanism allows for high-speed wafer exchange operations. ・Mapping sensors are also available. ・The R/T axis and Z axis are separated, making maintenance easy and capable of long lifting/lowering strokes. - We have added a model with increased arm rigidity that can also transport 450mm wafers.

  • Product

    Clean conveyance system Atmospheric conveyance robot Servo motor specification Free access robot

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1 Models of Clean conveyance system Atmospheric conveyance robot Servo motor specification Free access robot

Image Part Number Price (excluding tax) Weight Applicable work Repeatability Operating range Control method Utility Wafer grip confirmation Wafer gripping method
Clean conveyance system Atmospheric conveyance robot Servo motor specification Free access robot-Part Number-MTE-E

MTE-E

Available upon quote

Main unit: Approx. 50kg Controller (MCE): Approx. 18kg

Φ100mm~Φ300mmSEMI/JEITA standard product wafer

X,Y direction: ±0.1mm (30) Z axis: ±0.05mm (3c) P axis: 0.02deg (30)

R axis: 590mm (maximum arm reach) T axis: 350deg (origin: ±175deg) W axis: 360deg (origin: ± 180deg) Z axis: 300mmP axis: 180deg

RS232C,RS-485

Power supply: Single-phase AC208V 5A 1 system: Single-phase AC100V 7.5A 1 system Vacuum: -80kPa or less 1 system (Φ6xΦ4 polyurethane tube one-touch joint connection)

Vacuum sensor with digital display

Back side vacuum adsorption/drop-in/edge grip/Bernoulli

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About Company Handling This Product

TAZMO CO.,LTD.

Company Overview

TAZMO CO., LTD., founded in 1972 and based in Okayama, Japan, is a manufacturer and distributor of advanced ma...

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  • Japan

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Transfer Machinery
Transfer Machinery　TAZMO CO.,LTD.
TAZMO CO.,LTD.

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