Clean conveyance system Atmospheric conveyance robot Servo motor specification Atmospheric clean robot-TT301A-RA

Clean conveyance system Atmospheric conveyance robot Servo motor specification Atmospheric clean robot
TAZMO CO.,LTD.

About This Product

This product is a low-cost, high-performance transfer robot developed for EFEM. This is the flagship model of Tatsumo's transfer robot, which achieves high-speed reaction and high cleanliness.

■Product features・This product is covered by an 18-month warranty due to its highly reliable design.
- Compatible with SEMI F47.
・Compared to previous models, the rate of commonality of parts and modules has been increased, resulting in lower prices.
- Unique high-speed exchange mechanism reduces wafer exchange time by 50%.
・High-speed and smooth operation has been achieved by adopting a new control system.
・The robot footprint has been reduced by 15% and the controller volume has been reduced by 50% compared to the previous model.
・Supports 2FOUP without rails.
・Mapping sensors are also available.

Model
There are 1 models for this product.

Product
Clean conveyance system Atmospheric conveyance robot Servo motor specification Atmospheric clean robot

Handling Company
TAZMO CO.,LTD.

Categories

FA Equipment

Transfer Machinery

Conveyors

Conveyor Systems

Robots

Transport Robots

Robots

Cleanroom Robots

80+ people viewing

Last viewed: 15 hours ago

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1 Models of Clean conveyance system Atmospheric conveyance robot Servo motor specification Atmospheric clean robot

Image	Part Number	Price (excluding tax)	Weight	Applicable work	Repeatability	Operating range	Control method	Utility	Wafer grip confirmation	Wafer gripping method
	TT301A-RA	Available upon quote	Main unit: Approx. 35kg Controller (TT301A): Approx. 10kg	Φ100mm~Φ300mm SEMI/JEITA standard product wafer	X,Y direction: ±0.1mm (3σ) Z axis: ±0.05mm (3σ)	R axis: 430mm (maximum arm reach) T axis: 370deg (origin: ±185deg) Z axis: 330mm	RS232C, ETHERNET	Power supply: Single-phase AC200V ~ 230V 7.5A 1 system Vacuum: -80kPa or less 15L/min or more 1 system (Φ6 × Φ4 polyurethane tube one-touch joint connection)	Back side vacuum adsorption/drop-in/edge grip/Bernoulli	Back side vacuum adsorption/drop-in/edge grip/Bernoulli

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About Company Handling This Product

TAZMO CO.,LTD.

Company Overview

TAZMO CO., LTD., founded in 1972 and based in Okayama, Japan, is a manufacturer and distributor of advanced ma...

Japan

Clean conveyance system Atmospheric conveyance robot Servo motor specification Atmospheric clean robot TAZMO CO.,LTD.

About This Product

■Product features

1 Models of Clean conveyance system Atmospheric conveyance robot Servo motor specification Atmospheric clean robot

TT301A-RA

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Other products of TAZMO CO.,LTD.

About Company Handling This Product

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Clean conveyance system Atmospheric conveyance robot Servo motor specification Atmospheric clean robot
TAZMO CO.,LTD.