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  4. Phosphoric acid process equipment Phosphoric acid regeneration equipment PSYRION (TAZMO CO.,LTD.)
Phosphoric acid process equipment Phosphoric acid regeneration equipment PSYRION-PSYRION
Phosphoric acid process equipment Phosphoric acid regeneration equipment PSYRION-TAZMO CO.,LTD.

Phosphoric acid process equipment Phosphoric acid regeneration equipment PSYRION
TAZMO CO.,LTD.

About This Product

The hot phosphoric acid used for nitride film etching increases the concentration of silicon produced during the process, so it must be replaced regularly with new solution. By removing this silicon using our unique technology, it becomes possible to regenerate and reuse phosphoric acid. PSYRION ® is widely used by advanced semiconductor manufacturers, contributing to reductions in chemical costs and environmental protection.

■Product features

- Dramatically reduces phosphoric acid procurement costs. ・Reduces phosphoric acid waste and contributes to your company's environmental measures. - There is no limit to the number of plays. Can be played repeatedly. -Can be connected to multiple wet stations and treatment tanks. - Can be connected regardless of wet station manufacturer or model. -Equipped with automatic cleaning function inside the system. - Compatible with various options.

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    Phosphoric acid process equipment Phosphoric acid regeneration equipment PSYRION

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1 Models of Phosphoric acid process equipment Phosphoric acid regeneration equipment PSYRION

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Phosphoric acid process equipment Phosphoric acid regeneration equipment PSYRION-Part Number-PSYRION

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About Company Handling This Product

TAZMO CO.,LTD.

Company Overview

TAZMO CO., LTD., founded in 1972 and based in Okayama, Japan, is a manufacturer and distributor of advanced ma...

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  • Japan

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