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  3. Thermal Desorption Analyzers
  4. Ultra-high sensitivity thermal desorption analyzer HEMTO-TDS (Unisoku Co., Ltd.)
Ultra-high sensitivity thermal desorption analyzer HEMTO-TDS-HEMTO-TDS
Ultra-high sensitivity thermal desorption analyzer HEMTO-TDS-Unisoku Co., Ltd.

Ultra-high sensitivity thermal desorption analyzer HEMTO-TDS
Unisoku Co., Ltd.

Unisoku Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

51.7hours

About This Product

This is a device that detects hydrogen contained in minute substrates and thin films using the thermal desorption method. By using a BeCu chamber with low hydrogen solid solution and efficiently heating only the sample substrate using an infrared laser, we can suppress the increase in hydrogen background during heating and increase the amount of hydrogen desorbed from the sample. This is a device that can measure with sensitivity. Additionally, since a quadrupole mass spectrometer is used for detection, it is possible to analyze desorbed substances other than hydrogen.

■Application

・Detection of low concentration hydrogen in semiconductor substrates ・Detection of hydrogen mixed in thin film ・Detection of thermal desorption of impurity elements in micro samples ・Determination of the binding state of absorption and adsorption

■Device principle

・Local heating with infrared heating ・Temperature measurement and control using a radiation thermometer ・Low hydrogen background with BeCu chamber ・Higher sensitivity with orifice installation

  • Product

    Ultra-high sensitivity thermal desorption analyzer HEMTO-TDS

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1 Models of Ultra-high sensitivity thermal desorption analyzer HEMTO-TDS

Image Part Number Price (excluding tax) Mass analysis range Sample size Temperature control Heating method Ionic current
Ultra-high sensitivity thermal desorption analyzer HEMTO-TDS-Part Number-HEMTO-TDS

HEMTO-TDS

Available upon quote

1-100 amu

10mm×10mm

PID control using radiation thermometer
(Emissivity is calibrated using a temperature calibration board with thermocouple)
Temperature range 150℃-1000℃
Temperature rising rate can be set arbitrarily from 10℃/min to 100℃/min

Infrared laser heating (983nm)

Can detect up to 1×10-13A
Capable of detecting hydrogen ion implanted substrates up to 1×1015ion.cm2
5×1016 atoms/cm3, detecting hydrogen atoms at a concentration of about 1/1 million

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About Company Handling This Product

Unisoku Co., Ltd.

Response Rate

100.0%

Response Time

51.7hrs

  • Japan

Related search keywords

Thermal Desorption Analyzers
Thermal Desorption Analyzers　Unisoku Co., Ltd.
Unisoku Co., Ltd.

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