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Nanoprobe/Nano measurement processing machine XYZ 3-axis nanomanipulator/prober UMP1000-UMP1000
Nanoprobe/Nano measurement processing machine XYZ 3-axis nanomanipulator/prober UMP1000-Unisoku Co., Ltd.

Nanoprobe/Nano measurement processing machine XYZ 3-axis nanomanipulator/prober UMP1000
Unisoku Co., Ltd.

Unisoku Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

28.1hours

Relatively Fast Response


About This Product

Ideal for nano/micromanipulation probing under SEM, FIB, and optical microscopy. UMP1000 is a manipulator/prober that can operate in XYZ3 axes and rotary axes at the nanometer level. By combining it with a commercially available SEM/FIB/optical microscope, it can be used for various purposes such as manipulation/probing on the micro/nanometer scale. It can be incorporated into a SEM etc. depending on the application, such as micro-processing such as energization and cutting in a minute range using two probes, and resistance measurement using the four-terminal method using four probes.

■Features

・Easy operation, switching between coarse movement (accuracy of several hundred nm) and fine movement (accuracy of 0.5 nm or less) enables quick positioning. ・Achieving low price ・Can be combined with commercially available SEM/FIB/optical microscopes ・Wide range of operating environments from air to ultra-high vacuum, room temperature to extremely low temperatures ・Supports multi-probing ・Suitable for a wide range of applications such as manipulation, IV measurement of semiconductor nanodevices, resistance measurement, and EBIC measurement

■Applications

・Fine adjustment of the tip position on the nanometer order (probing) under observation with SEM/FIB/optical microscope, etc. ・Probing in the atmosphere to ultra-high vacuum, and in environments ranging from room temperature to extremely low temperatures - Microscopic manipulation on the nanometer order, surface electrical property measurements such as IV measurement, resistance measurement, and EBIC measurement of semiconductor nanodevices.

■Configuration

・Main unit 1 unit ・1 controller ・Accessories 1 set ・1 Windows® notebook PC (optional/sold separately)

  • Product

    Nanoprobe/Nano measurement processing machine XYZ 3-axis nanomanipulator/prober UMP1000

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1 Models of Nanoprobe/Nano measurement processing machine XYZ 3-axis nanomanipulator/prober UMP1000

Image Part Number Price (excluding tax) Body weight Body dimensions (including protruding parts) Minimum travel (resolution) Pulse (coarse) mode Minimum travel (resolution) DC (fine movement) mode Maximum travel amount Pulse (coarse) mode Maximum travel DC (fine movement) mode Connection cable (output) Operating environment Temperature Operating environment pressure Controller weight Controller power consumption Controller dimensions Controller input voltage Controller input output Controller Operating humidity range Controller operating temperature range Accessories
Nanoprobe/Nano measurement processing machine XYZ 3-axis nanomanipulator/prober UMP1000-Part Number-UMP1000

UMP1000

Available upon quote

60 g or less Main body (excluding mounting base)

Main body: approx. 25 (H) x approx. 50 (D) x approx. 20 (W) mm (excluding probe)

200 nm or less (XYZ axes)

0.5 nm or less (XYZ axis)

XY axis: 5 mm, Z axis: 3 mm

XYZ axis: 1 μm

Standard control terminal (Dsub-15) 2 m 1 set *Ultra-high vacuum/cryogenic temperature compatible (made to order) 2 m 1 set

4 K ~ 310 K, baking temperature below 373 K

Near atmospheric pressure and 10-2Pa~10^-8Pa (There are vacuum areas that cannot be used due to piezo element discharge)

8 kg or less

100 VA or less

480 (W) × 100 (H) × 460 (D) mm

100VAC (50/60Hz)

Control terminal (Dsub-15)

15% ~ 80%

5°C ~ 40°C

1 CD-ROM for standard control software, 1 dedicated connection cable (USB) 3m between Windows PC and controller, 1 dedicated connection cable 5m for controller (separate connector), 1 AC cable 1.5m

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About Company Handling This Product

Response Rate

100.0%


Response Time

28.1hrs

  • Japan

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