Nanoprobe/Nano measurement processing machine XYZ 3-axis nanomanipulator/prober UMP1000
Unisoku Co., Ltd.
About This Product
Ideal for nano/micromanipulation probing under SEM, FIB, and optical microscopy. UMP1000 is a manipulator/prober that can operate in XYZ3 axes and rotary axes at the nanometer level. By combining it with a commercially available SEM/FIB/optical microscope, it can be used for various purposes such as manipulation/probing on the micro/nanometer scale.
It can be incorporated into a SEM etc. depending on the application, such as micro-processing such as energization and cutting in a minute range using two probes, and resistance measurement using the four-terminal method using four probes.
■Features
・Easy operation, switching between coarse movement (accuracy of several hundred nm) and fine movement (accuracy of 0.5 nm or less) enables quick positioning.
・Achieving low price
・Can be combined with commercially available SEM/FIB/optical microscopes
・Wide range of operating environments from air to ultra-high vacuum, room temperature to extremely low temperatures
・Supports multi-probing
・Suitable for a wide range of applications such as manipulation, IV measurement of semiconductor nanodevices, resistance measurement, and EBIC measurement
■Applications
・Fine adjustment of the tip position on the nanometer order (probing) under observation with SEM/FIB/optical microscope, etc.
・Probing in the atmosphere to ultra-high vacuum, and in environments ranging from room temperature to extremely low temperatures
- Microscopic manipulation on the nanometer order, surface electrical property measurements such as IV measurement, resistance measurement, and EBIC measurement of semiconductor nanodevices.
■Configuration
・Main unit 1 unit
・1 controller
・Accessories 1 set
・1 Windows® notebook PC (optional/sold separately)
-
Product
Nanoprobe/Nano measurement processing machine XYZ 3-axis nanomanipulator/prober UMP1000
-
Handling Company
Unisoku Co., Ltd.
-
Categories
1 Models of Nanoprobe/Nano measurement processing machine XYZ 3-axis nanomanipulator/prober UMP1000
| Product Image | Part Number | Price (excluding tax) | Accessories | Body dimensions (including protruding parts) | Body weight | Connection cable (output) | Controller Operating humidity range | Controller dimensions | Controller input output | Controller input voltage | Controller operating temperature range | Controller power consumption | Controller weight | Maximum travel DC (fine movement) mode | Maximum travel amount Pulse (coarse) mode | Minimum travel (resolution) DC (fine movement) mode | Minimum travel (resolution) Pulse (coarse) mode | Operating environment Temperature | Operating environment pressure |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
|
|
UMP1000 |
Available upon quote | 1 CD-ROM for standard control software, 1 dedicated connection cable (USB) 3m between Windows PC and controller, 1 dedicated connection cable 5m for controller (separate connector), 1 AC cable 1.5m | Main body: approx. 25 (H) x approx. 50 (D) x approx. 20 (W) mm (excluding probe) | 60 g or less Main body (excluding mounting base) | Standard control terminal (Dsub-15) 2 m 1 set *Ultra-high vacuum/cryogenic temperature compatible (made to order) 2 m 1 set | 15% ~ 80% | 480 (W) × 100 (H) × 460 (D) mm | Control terminal (Dsub-15) | 100VAC (50/60Hz) | 5°C ~ 40°C | 100 VA or less | 8 kg or less | XYZ axis: 1 μm | XY axis: 5 mm, Z axis: 3 mm | 0.5 nm or less (XYZ axis) | 200 nm or less (XYZ axes) | 4 K ~ 310 K, baking temperature below 373 K | Near atmospheric pressure and 10-2Pa~10^-8Pa (There are vacuum areas that cannot be used due to piezo element discharge) |
Customers who viewed this product also viewed
Other products of Unisoku Co., Ltd.
View more products of Unisoku Co., Ltd.
About Company Handling This Product
- Japan