SPM unit products Ultra-high vacuum evaporator UE series UE-103C/104C-UE-103C

SPM unit products Ultra-high vacuum evaporator UE series UE-103C/104C
Unisoku Co., Ltd.

Unisoku Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

51.7hours

About This Product

Compact multi-source deposition source. This is a multi-source evaporation source that can evaporate trace amounts of metals or organic substances onto the sample surface in ultra-high vacuum. Shutter and film thickness measurement functions can be added as options.

■Features・Compact and cost-effective crucible-type 3- or 4-component evaporation source
・Two models are available: multi-element high temperature evaporator (temperature range 700°C to 1,700°C) UE-103C/104C series and multi-element evaporator (temperature range 150°C to 800°C) UE-203C/204C series.
・Additional shutter, film thickness measurement function (optional)

■ApplicationsVapor deposition of trace amounts of metal or organic matter onto the target sample surface in ultra-high vacuum

■ UE series common・Heating method: Filament current heating method
・Crucible volume: Inner diameter 2.6 x depth 6 mm (Recommended filling amount is 1/2 or less of the crucible volume)
・Number of crucibles: 4 without shutter function, 3 with shutter function
・Mounting flange: ICF70
・Distance to target: 100 mm or more from the tip of the crucible head (200 mm or more from the mounting flange is recommended for standard deposition source size)
・Installation direction: Must be installed at least 30 degrees upward from the horizontal surface
・Shutter: Manual opening/closing using rotating introduction machine
・Film thickness meter: installed on the side of the crucible on the shutter plate

■Multiple high temperature evaporator・Heating temperature: 700 to 1,700℃ (recommended temperature for continuous operation is up to 1,600℃)
・Cooling mechanism: Equipped with water cooling jacket (water cooling is required when used at temperatures above 1,000℃)
・Crucible material: Alumina
・Thermocouple: W-Re used

■Multiple evaporator・Heating temperature: 150-800℃
・Cooling mechanism: Equipped with water cooling jacket (water cooling is required when using at temperatures above 500℃)
・Crucible material: Tantalum
・Thermocouple: K type

Model
There are 1 models for this product.

Product
SPM unit products Ultra-high vacuum evaporator UE series UE-103C/104C

Handling Company
Unisoku Co., Ltd.

Categories

Machining / Machine Tools

Vacuum equipment

Separation and Extraction Equipment

Evaporators

100+ people viewing

Last viewed: 7 hours ago

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1 Models of SPM unit products Ultra-high vacuum evaporator UE series UE-103C/104C

Image	Part Number	Price (excluding tax)	Vapor deposition source	Film thickness meter function Film thickness meter element mounting position	Film thickness meter function Film thickness meter element	Film thickness meter function Film thickness monitor	Vacuum chamber installation direction	Material form	Material filling amount	Mounting flange	Heating current	Heating temperature range	Heating method	Cooling mechanism	Number of elements (crucible)	Usable deposition materials	Crucible volume	Baking temperature	Flange/crucible tip distance	Target distance	Shutter function Opening/closing mechanism	Shutter function Shutter plate	Connector
	UE-103C	Available upon quote	Crucible deposition source	Shutter plate surface *Standard equipment for L103CSF/103CSF series	Crystal unit *Standard on L103CSF/103CSF series	Equipped as standard with Inficon's film thickness meter monitor (XTM/2) *Equipped as standard with L103CSF/103CSF series	Must be mounted >30° above the horizontal plane	Items that enter the crucible such as powder, granules, wire rods, etc.	Recommended to be 1/2 or less of the crucible (depending on the installation angle)	ICF70	Max 7.5A~14V	700~1,700℃ (Recommended temperature for continuous use 700~1600℃) When controlled by our temperature controller, maximum 1,600℃ (Denryu: 7A) Temperature cannot be measured if the model does not have a thermometer.	Filament electrical heating method	Water cooling jacket standard equipment (water volume: 1L/min) *Water cooling is especially required when using at temperatures above 1,000℃.	Without shutter function: 4 pieces, with shutter function: 3 pieces	Elements that can be vacuum evaporated at temperatures below 1,700℃, but elements that evaporate below 700℃ are difficult to control.	3 (dia.) × 6 (depth) mm (Material: Alumina)	<200°C	Standard distance from the mounting flange surface to the tip of the crucible head (without shutter) is 100mm (extension can be specified when ordering)	100mm or more from the tip of the crucible head	Manual opening/closing using rotation introduction device (with rotation stopper) *Standard equipment for L103CS/103CS series	Size: 34mm dia. Turning radius: 30mm *Standard on L103CS/103CS series	10P Denryu introduction terminal

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About Company Handling This Product

Unisoku Co., Ltd.

Response Rate

100.0%

Response Time

51.7hrs

Japan

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SPM unit products Ultra-high vacuum evaporator UE series UE-103C/104C Unisoku Co., Ltd.

Unisoku Co., Ltd.'s Response Status

About This Product

■Features

■Applications

■ UE series common

■Multiple high temperature evaporator

■Multiple evaporator

1 Models of SPM unit products Ultra-high vacuum evaporator UE series UE-103C/104C

UE-103C

Customers who viewed this product also viewed

Other products of Unisoku Co., Ltd.

About Company Handling This Product

Related search keywords

SPM unit products Ultra-high vacuum evaporator UE series UE-103C/104C
Unisoku Co., Ltd.