SPM unit products Ultra-high vacuum evaporator UE series UE-103C/104C
Unisoku Co., Ltd.
About This Product
Compact multi-source deposition source. This is a multi-source evaporation source that can evaporate trace amounts of metals or organic substances onto the sample surface in ultra-high vacuum. Shutter and film thickness measurement functions can be added as options.
■Features
・Compact and cost-effective crucible-type 3- or 4-component evaporation source
・Two models are available: multi-element high temperature evaporator (temperature range 700°C to 1,700°C) UE-103C/104C series and multi-element evaporator (temperature range 150°C to 800°C) UE-203C/204C series.
・Additional shutter, film thickness measurement function (optional)
■Applications
Vapor deposition of trace amounts of metal or organic matter onto the target sample surface in ultra-high vacuum
■ UE series common
・Heating method: Filament current heating method
・Crucible volume: Inner diameter 2.6 x depth 6 mm (Recommended filling amount is 1/2 or less of the crucible volume)
・Number of crucibles: 4 without shutter function, 3 with shutter function
・Mounting flange: ICF70
・Distance to target: 100 mm or more from the tip of the crucible head (200 mm or more from the mounting flange is recommended for standard deposition source size)
・Installation direction: Must be installed at least 30 degrees upward from the horizontal surface
・Shutter: Manual opening/closing using rotating introduction machine
・Film thickness meter: installed on the side of the crucible on the shutter plate
■Multiple high temperature evaporator
・Heating temperature: 700 to 1,700℃ (recommended temperature for continuous operation is up to 1,600℃)
・Cooling mechanism: Equipped with water cooling jacket (water cooling is required when used at temperatures above 1,000℃)
・Crucible material: Alumina
・Thermocouple: W-Re used
■Multiple evaporator
・Heating temperature: 150-800℃
・Cooling mechanism: Equipped with water cooling jacket (water cooling is required when using at temperatures above 500℃)
・Crucible material: Tantalum
・Thermocouple: K type
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Product
SPM unit products Ultra-high vacuum evaporator UE series UE-103C/104C
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Handling Company
Unisoku Co., Ltd.
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Categories
1 Models of SPM unit products Ultra-high vacuum evaporator UE series UE-103C/104C
| Product Image | Part Number | Price (excluding tax) | Baking temperature | Connector | Cooling mechanism | Crucible volume | Film thickness meter function Film thickness meter element | Film thickness meter function Film thickness meter element mounting position | Film thickness meter function Film thickness monitor | Flange/crucible tip distance | Heating current | Heating method | Heating temperature range | Material filling amount | Material form | Mounting flange | Number of elements (crucible) | Shutter function Opening/closing mechanism | Shutter function Shutter plate | Target distance | Usable deposition materials | Vacuum chamber installation direction | Vapor deposition source |
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UE-103C |
Available upon quote | <200°C | 10P Denryu introduction terminal | Water cooling jacket standard equipment (water volume: 1L/min) *Water cooling is especially required when using at temperatures above 1,000℃. | 3 (dia.) × 6 (depth) mm (Material: Alumina) | Crystal unit *Standard on L103CSF/103CSF series | Shutter plate surface *Standard equipment for L103CSF/103CSF series | Equipped as standard with Inficon's film thickness meter monitor (XTM/2) *Equipped as standard with L103CSF/103CSF series | Standard distance from the mounting flange surface to the tip of the crucible head (without shutter) is 100mm (extension can be specified when ordering) | Max 7.5A~14V | Filament electrical heating method |
700~1,700℃ (Recommended temperature for continuous use 700~1600℃) *When controlled by our temperature controller, maximum 1,600℃ (Denryu: 7A) *Temperature cannot be measured if the model does not have a thermometer. |
Recommended to be 1/2 or less of the crucible (depending on the installation angle) | Items that enter the crucible such as powder, granules, wire rods, etc. | ICF70 | Without shutter function: 4 pieces, with shutter function: 3 pieces | Manual opening/closing using rotation introduction device (with rotation stopper) *Standard equipment for L103CS/103CS series | Size: 34mm dia. Turning radius: 30mm *Standard on L103CS/103CS series | 100mm or more from the tip of the crucible head | Elements that can be vacuum evaporated at temperatures below 1,700℃, but elements that evaporate below 700℃ are difficult to control. | Must be mounted >30° above the horizontal plane | Crucible deposition source |
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About Company Handling This Product
- Japan