Non-contact thickness step measuring device THS-10
Union Optical Co., Ltd.
About This Product
■Features
・Thickness at minute locations can be measured without contact.
- Can measure thickness from several microns to 10mm.
・Easy to measure X.Y.Z.
・Manual type allows you to manually move the Z-axis of the upper and lower optical systems and measure the thickness on the monitor (measurement resolution 1μm).
■Thickness measurement principle
The thickness measurement principle of THS is based on Union Optical's original optical theory, which has a precision focus unit using two target mark systems placed in the microscope optical system. This Precise Focus Unit has a built-in target mark, which is clearly displayed on the monitor at the focused position.
The important point here is that even when there is no object under test, this target mark forms an image at the focused position (in the air) of the objective lens, and the image (target mark) is focused on the other objective lens. This can be confirmed using the optical system. THS takes advantage of this characteristic by arranging an optical system with precision focus units on the top and bottom, and setting the zero thickness position using a target mark. In other words, at the position where the target mark of the lower Precise Focus Unit can be confirmed with the upper objective lens without an object to be inspected, the target mark of the upper Precise Focus Unit can be confirmed with the lower objective lens at the same time.
On the other hand, the Precise Focus Unit optical system placed at the top and bottom has a mechanism in which when the lower optical system is moved up or down (Z), the upper optical system follows suit, and that only the upper optical system can focus independently. It has become. By combining this mechanical mechanism with the characteristics of two precision focus units, precise optical non-contact (thickness) measurement is now possible.
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Product
Non-contact thickness step measuring device THS-10
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Handling Company
Union Optical Co., Ltd.
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Categories
1 Models of Non-contact thickness step measuring device THS-10
| Product Image | Part Number | Price (excluding tax) | Measurement area | Measurement resolution | Measurement stage | Measuring range | THS body | Thickness and step measurement |
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THS-10 |
Available upon quote | Φ40μm or more | 1μm | Manual movement. X/Y coordinate reading is done using a linear scale, with a minimum reading of 1μm. | X:100mmY:100mm | The Z movement of the upper and lower optical systems is performed manually, and the match between the upper and lower target marks is confirmed on the monitor. | Minimum reading 1μm with linear gauge |
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About Company Handling This Product
- Japan