Macro defect inspection device ED-Scope
Photonic Instruments Co., Ltd.
About This Product
ED-Scope is a device for visualizing surface defects and internal defects in optical glass substrates, thin films, wafers, etc. Normally, in the process of visual inspection, errors due to worker ability and human error occur, making it difficult to obtain stable inspection results. Therefore, by using ED-Scope, which combines a special optical system, CMOS camera, and special image processing software, to visualize minute defects that are difficult to see with the human eye in a wide field of view, inspection accuracy can be improved and different tasks can be performed. Reduces the error between people. Used for shipping inspection and receiving inspection, contributing to yield and quality improvement.
■Inspection target
Transparent samples: Surface defects such as scratches, film unevenness, and polishing marks on samples that transmit light (glass, crystal, sapphire, resin films, etc.) and internal defects such as striae and growth stripes. Reflective samples: Surface defects such as water marks, dimples, thin film unevenness, liquid drips, saw marks, cracks, and scratches on samples that do not transmit light (silicon wafers, etc.).
■Surface defects (surface defects of optical glass base plates such as glass, crystal, sapphire, etc.)
・Orange peel (numerous rounded irregularities that occur on the polished surface)
・Polishing marks
・Surface sag (a condition in which a large amount of the edge of the blank plate is unintentionally shaved off during polishing)
・Adhesion marks
■Internal defects (optical glass base plates such as glass, crystal, sapphire, etc.)
・Striae (a type of defect. A refractive index that differs from the normal refractive index of the surrounding area occurs locally.)
・Growth stripes (stripes seen in crystal growth)
・Twins (twin boundaries are planar defects.)
■Surface defects on silicon wafers
・Watermark
・Polishing marks
・Thin film unevenness
・Pattern defects
■Principle
The observation principle of V-Scope is a special illumination method. Two mirrors are used to create an ideal parallel beam of light emitted from a point light source, which is then transmitted through the observation sample. The transmitted light beam is reflected from the bottom mirror, passes through the observation sample again, and is imaged on the camera. At this time, if there is a difference in refractive index on the sample due to scratches or striae, this will appear as a shadow on the image. In the case of a reflective sample, the sample itself acts as a mirror and forms an image on the camera.
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Product
Macro defect inspection device ED-Scope
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Handling Company
Photonic Instruments Co., Ltd.
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Categories
1 Models of Macro defect inspection device ED-Scope
| Product Image | Part Number | Price (excluding tax) | ED processing automatic control mechanism | ED special image processing | Frame rate | Light source (LED 3W) | Main unit unit configuration | Observation specifications | Optical field of view | PC section unit configuration | Power supply | Resolution | Size | Weight |
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ED-Scope |
Available upon quote | Automatic motor control and setting of focus mechanism from PC | Special image processing software that uses multiple image data | 35 frames/sec (MAX): Still images (BMP/JPG), videos (MPG) | 3W, average lifespan of approximately 25,000h (depending on usage environment), light aperture 0 to 8 levels | High-resolution macro lens, digital CMOS camera, special lighting section, micro-tilt sample stage | Reflected light (surface defects) / Transmitted light observation (internal defects) |
Minimum approximately 136mm (horizontal) x 115mm (vertical) Maximum approximately 34mm (horizontal) x 28mm (vertical) |
PC (windows10), LCD monitor TFT wide 28 inches |
AC100V (PC/Monitor) ・AC adapter (light source: DC5V) ・CMOS camera: DC5V:USB3.0 AC100 (motor) ・DC24V (motor driver) |
5 million pixel CMOS camera (2/3 inch, 2,448 x 2,048 pixels) | 300 (W) x 470 (D) x 990 (H) mm | Approximately 30Kg |
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