Macro defect inspection device ED-Scope-ED-Scope

Macro defect inspection device ED-Scope
Photonic Instruments Co., Ltd.

Photonic Instruments Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

33.0hours

Relatively Fast Response

About This Product

ED-Scope is a device for visualizing surface defects and internal defects in optical glass substrates, thin films, wafers, etc. Normally, in the process of visual inspection, errors due to worker ability and human error occur, making it difficult to obtain stable inspection results. Therefore, by using ED-Scope, which combines a special optical system, CMOS camera, and special image processing software, to visualize minute defects that are difficult to see with the human eye in a wide field of view, inspection accuracy can be improved and different tasks can be performed. Reduces the error between people. Used for shipping inspection and receiving inspection, contributing to yield and quality improvement.

■Inspection targetTransparent samples: Surface defects such as scratches, film unevenness, and polishing marks on samples that transmit light (glass, crystal, sapphire, resin films, etc.) and internal defects such as striae and growth stripes. Reflective samples: Surface defects such as water marks, dimples, thin film unevenness, liquid drips, saw marks, cracks, and scratches on samples that do not transmit light (silicon wafers, etc.).

■Surface defects (surface defects of optical glass base plates such as glass, crystal, sapphire, etc.)・Orange peel (numerous rounded irregularities that occur on the polished surface)
・Polishing marks
・Surface sag (a condition in which a large amount of the edge of the blank plate is unintentionally shaved off during polishing)
・Adhesion marks

■Internal defects (optical glass base plates such as glass, crystal, sapphire, etc.)・Striae (a type of defect. A refractive index that differs from the normal refractive index of the surrounding area occurs locally.)
・Growth stripes (stripes seen in crystal growth)
・Twins (twin boundaries are planar defects.)

■Surface defects on silicon wafers・Watermark
・Polishing marks
・Thin film unevenness
・Pattern defects

■PrincipleThe observation principle of V-Scope is a special illumination method. Two mirrors are used to create an ideal parallel beam of light emitted from a point light source, which is then transmitted through the observation sample. The transmitted light beam is reflected from the bottom mirror, passes through the observation sample again, and is imaged on the camera. At this time, if there is a difference in refractive index on the sample due to scratches or striae, this will appear as a shadow on the image. In the case of a reflective sample, the sample itself acts as a mirror and forms an image on the camera.

Model
There is 1 model available for this product.

Product
Macro defect inspection device ED-Scope

Handling Company
Photonic Instruments Co., Ltd.

Categories

Observation Equipment

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1 Models of Macro defect inspection device ED-Scope

Image	Part Number	Price (excluding tax)	Weight	Resolution	Observation specifications	Main unit unit configuration	Size	Light source (LED 3W)	Optical field of view	Power supply	Frame rate	PC section unit configuration	ED special image processing	ED processing automatic control mechanism
	ED-Scope	Available upon quote	Approximately 30Kg	5 million pixel CMOS camera (2/3 inch, 2,448 x 2,048 pixels)	Reflected light (surface defects) / Transmitted light observation (internal defects)	High-resolution macro lens, digital CMOS camera, special lighting section, micro-tilt sample stage	300 (W) x 470 (D) x 990 (H) mm	3W, average lifespan of approximately 25,000h (depending on usage environment), light aperture 0 to 8 levels	Minimum approximately 136mm (horizontal) x 115mm (vertical) Maximum approximately 34mm (horizontal) x 28mm (vertical)	AC100V (PC/Monitor) ・AC adapter (light source: DC5V) ・CMOS camera: DC5V:USB3.0 AC100 (motor) ・DC24V (motor driver)	35 frames/sec (MAX): Still images (BMP/JPG), videos (MPG)	PC (windows10), LCD monitor TFT wide 28 inches	Special image processing software that uses multiple image data	Automatic motor control and setting of focus mechanism from PC

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About Company Handling This Product

Photonic Instruments Co., Ltd.

Response Rate

100.0%

Response Time

33.0hrs

Japan

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Macro defect inspection device ED-Scope Photonic Instruments Co., Ltd.

Photonic Instruments Co., Ltd.'s Response Status

About This Product

■Inspection target

■Surface defects (surface defects of optical glass base plates such as glass, crystal, sapphire, etc.)

■Internal defects (optical glass base plates such as glass, crystal, sapphire, etc.)

■Surface defects on silicon wafers

■Principle

1 Models of Macro defect inspection device ED-Scope

ED-Scope

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Other products of Photonic Instruments Co., Ltd.

About Company Handling This Product

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Macro defect inspection device ED-Scope
Photonic Instruments Co., Ltd.