This product is registered by Toyominato Co., Ltd..
About This Product
A product that has been processed to coat a wafer with a film is called a "wafer with film." The wafer deposition process includes interlayer insulation materials as insulating films, metal films as conductive materials, resists as process materials, and protective films.
Below are sputtering targets that we own. Wafers with membranes can be created with any combination.
■METALS
Au, Al, Ag, B, C, Co, Cr, Cu, Fe, Ge, Hf, In, Ir, Mg, Mn, Mo, Nb, Ni, Pd, Pt, Rh, Ru, Si (N type) ( 1 to 50 Ω・cm), Si (P type) (1 to 50 Ω・cm), Si (N type) (high resistance) (1000 Ω・cm or more), Si (N type) (High resistance) (5000 Ω・cm or more), Sn, Ta, Ti, V, W, Y, Zn, Zr
■OXIDES
Al2O3, AZO, BaTiO3, CeO2, CuO, Fe2O3, Ga2O3, Gd2O3, HfO2, In2O3, ITO, IZO, LiCoO2, LiMn2O4, LiNbO3, Li3PO4, M gO, Mn2O3, Nb2O5, NiO, PZT, RuO2, SiO, SiO2, SnO, SnO2, SrRuO3, SrTiO3, Ta2O5, TiO2, WO3, Y2O3, ZnO, ZrO2:Y2O3
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Product
3-4 inch silicon wafer with membrane
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