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  2. Film-forming material IGZO target (ULVAC Sales Co., Ltd.)
Film-forming material IGZO target-IGZO target
Film-forming material IGZO target-ULVAC Sales Co., Ltd.

Film-forming material IGZO target
ULVAC Sales Co., Ltd.

About This Product

■Summary

ULVAC manufactures and sells IGZO targets used in IGZO TAOS (transparent amorphous oxide semiconductor using In, Ga, Zn, and O). In addition to working to increase target density and reduce the number of splits to suppress particles, we also supply high-quality IGZO target materials, IGZO sputtering equipment, and processes to most display manufacturers around the world. Additionally, ULVAC has successfully developed a large IGZO target material with a length of approximately 3 meters. This large IGZO target is expected to fundamentally solve the problem of deterioration in TFT characteristics.

■Features

・High quality target due to higher density and reduced number of divisions ・Few particles and stable film properties ・Mass production possible using large mass production machines ・Can provide 3m large IGZO target

  • Product

    Film-forming material IGZO target

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1 Models of Film-forming material IGZO target

Image Part Number Price (excluding tax)
Film-forming material IGZO target-Part Number-IGZO target

IGZO target

Available upon quote

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About Company Handling This Product

ULVAC Sales Co., Ltd.

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