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  2. Sputtering target for FPD manufacturing equipment (ULVAC Sales Co., Ltd.)
Sputtering target for FPD manufacturing equipment-Sputtering target for FPD manufacturing equipment
Sputtering target for FPD manufacturing equipment-ULVAC Sales Co., Ltd.

Sputtering target for FPD manufacturing equipment
ULVAC Sales Co., Ltd.

About This Product

■We supply high quality and stable materials to the FPD (Flat Panel Display) market, which is becoming more diverse and larger.

・Securing materials worldwide ・Quality control equipment and system that can handle large targets (supports not only G8 generation but also ultra-large glass substrates) ・In conjunction with the Super Materials Research Institute, we supply the optimal materials for our customers' processes. Features

■Detailed quality assurance

We have introduced large-scale ultrasonic flaw detection equipment to perform careful inspections for defects in materials and bonding. This reduces the amount of arcing generated during sputtering and provides high quality targets.

■Highly reliable metal bonding technology

We have installed bonding equipment that can handle larger glass substrates and film-forming equipment, and have established a reliable target supply system.

■Others

・Sputtering target that suppresses particle generation ・High uniformity due to metal composition adjustment

■Cu-Mg-Al alloy for low resistance Cu wiring process

・A target that can be used to form films for low-resistance wiring processes. (Laminated structure using Cu-Mg-Al alloy as adhesive layer of pure Cu film) ・Good adhesion to glass substrates, oxide layers (ITO, etc.), and Si-based underlayers (SiO2) ・As it is a Cu-based material similar to the wiring layer, processing by wet etching is easy (processing is possible with an etching solution (1 solution) that does not use perhydrogen or hydrofluoric acid) ・Low cost process ・Inexpensive target material

■Sputtering target material for FPD

*Please contact us separately regarding material support and handling.

  • Product

    Sputtering target for FPD manufacturing equipment

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1 Models of Sputtering target for FPD manufacturing equipment

Image Part Number Price (excluding tax)
Sputtering target for FPD manufacturing equipment-Part Number-Sputtering target for FPD manufacturing equipment

Sputtering target for FPD manufacturing equipment

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About Company Handling This Product

ULVAC Sales Co., Ltd.

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