Vacuum valve Gate valve Large pendulum valve VFR series
ULVAC Sales Co., Ltd.
About This Product
■Summary
This is a large pendulum valve (gate valve) developed using ULVAC's unique technology. Compatible with large vacuum equipment such as display film deposition equipment.
■Applications
・Large display manufacturing equipment
・Organic EL manufacturing equipment
・Main valves and partition valves for other vacuum equipment
Features
■ULVAC's unique mechanism
・Uses a unique sealing mechanism and back pressure canceling mechanism that does not have a mechanical locking mechanism.
・Structure with extremely few sliding parts that can cause particles
- Almost no shock (vibration) during opening/closing and sealing
■Excellent maintainability
The valve case can be attached and detached without removing the valve from the device or pump.
With the case removed, the valve unit can be attached or detached by removing one bolt.
■Design that can be installed anywhere
The VFR series can be installed in 360 degrees.
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Product
Vacuum valve Gate valve Large pendulum valve VFR series
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Handling Company
ULVAC Sales Co., Ltd.
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Categories
1 Models of Vacuum valve Gate valve Large pendulum valve VFR series
| Product Image | Part Number | Price (excluding tax) |
|---|---|---|
|
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VFR-400 |
Available upon quote |
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About Company Handling This Product
- Japan