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  1. Metoree
  2. Valves
  3. Vacuum Gate Valves
  4. Vacuum valve Gate valve Large pendulum valve VFR series (ULVAC Sales Co., Ltd.)
Vacuum valve Gate valve Large pendulum valve VFR series-VFR-400
Vacuum valve Gate valve Large pendulum valve VFR series-ULVAC Sales Co., Ltd.

Vacuum valve Gate valve Large pendulum valve VFR series
ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

125.8hours

About This Product

■Summary

This is a large pendulum valve (gate valve) developed using ULVAC's unique technology. Compatible with large vacuum equipment such as display film deposition equipment.

■Applications

・Large display manufacturing equipment ・Organic EL manufacturing equipment ・Main valves and partition valves for other vacuum equipment Features

■ULVAC's unique mechanism

・Uses a unique sealing mechanism and back pressure canceling mechanism that does not have a mechanical locking mechanism. ・Structure with extremely few sliding parts that can cause particles - Almost no shock (vibration) during opening/closing and sealing

■Excellent maintainability

The valve case can be attached and detached without removing the valve from the device or pump. With the case removed, the valve unit can be attached or detached by removing one bolt.

■Design that can be installed anywhere

The VFR series can be installed in 360 degrees.

  • Product

    Vacuum valve Gate valve Large pendulum valve VFR series

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1 Models of Vacuum valve Gate valve Large pendulum valve VFR series

Image Part Number Price (excluding tax) Face-to-face dimension Opening/closing operation time (2 position specification) Opening/closing principle Opening/closing specifications Open conductance Total mass Oils and fats Connection flange (JIS B2290 equivalent) Valve plate seal performance Compressed air supply port diameter Nominal diameter Mounting position Operating environment temperature Fluid temperature used Working pressure range Main parts material Maintenance cycle Allowable baking temperature (at rest) Seal parts material Cylinder supply pressure air pressure
Vacuum valve Gate valve Large pendulum valve VFR series-Part Number-VFR-400

VFR-400

Available upon quote

150mm

8s or less

Pneumatically actuated

2 position

50,000L/s

98kg

Z300 grease

VF400

Compatible with back pressure

Φ8 pipe fitting

Φ400mm

Freedom

10~80℃

10~80℃

1.0×10^-5Pa~0.12MPa (abs)

Valve body: AC4CH-T6
Valve plate: AC4CH-T6

100,000 times

Valve body: below 120℃
Cylinder: 80℃ or less

Vacuum side: Fluororubber

0.5~0.7MPaG

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About Company Handling This Product

ULVAC Sales Co., Ltd.

Response Rate

100.0%

Response Time

125.8hrs

  • Japan

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