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Various power supply/robot-related crystal oscillation type deposition controller data collection software Depoview-Depoview
Various power supply/robot-related crystal oscillation type deposition controller data collection software Depoview-ULVAC Sales Co., Ltd.

Various power supply/robot-related crystal oscillation type deposition controller data collection software Depoview
ULVAC Sales Co., Ltd.


About This Product

■Summary

Depoview is software that collects data on film thickness, deposition rate, power, and crystal oscillator frequency for ULVAC's crystal oscillation deposition controller (CRTM). By connecting the CRTM and a computer with an RS-232C communication cable, you can display, save, and manage the history of logging data in real time. Depoview is compatible with CRTM-9100G and CRTM-6000G.

■Applications

Collect, real-time display, save, and manage data on CRTM film thickness, deposition rate, power, and crystal oscillator frequency.

■Features

・Data on CRTM film thickness, film formation speed, power, and crystal oscillator frequency can be displayed in real time on the screen. - Trend graphs of film thickness, film formation speed, power, and crystal oscillator frequency can be displayed on the screen while the program is running. -Logging data can be saved to a file in CSV format. - Logging data in CSV format can be read and displayed on a graph.

■Real-time display

The current film thickness, deposition rate, power, crystal oscillator frequency, layer number, and program number are displayed on the screen. CRTM-9100G supports installation of four SS module cards.

■Trend graph display

Trend graphs of film thickness, film formation speed, power, and crystal oscillator frequency during program operation are displayed on the screen. Maximum/minimum/average values, screen enlargement/movement display are possible.

■Data logging

Record the film thickness, deposition speed, power, crystal oscillator frequency, layer number, and program number while the program is running, and save the data in a CSV format file. *Layer number and program number cannot be obtained with CRTM-9100G.

■History management

Logging data is saved to a file in CSV format. Logging data can be read and displayed on a graph.

  • Product

    Various power supply/robot-related crystal oscillation type deposition controller data collection software Depoview

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1 Models of Various power supply/robot-related crystal oscillation type deposition controller data collection software Depoview

Image Part Number Price (excluding tax) Operating environment Memory Operating environment Other hardware Operating environment OS Operating environment CPU Accessories
Various power supply/robot-related crystal oscillation type deposition controller data collection software Depoview-Part Number-Depoview

Depoview

Available upon quote

256MB or more

COM port, USB port, CD-ROM drive, resolution XGA or higher

WindowsXP/7 Japanese version

PentiumIII 1GHz or higher or compatible processor

Setup CD
Installation instructions
License key (using USB port)
*RS-232C communication cable to connect with CRTM is not included.

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