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  4. Various power supplies/robot related vacuum transfer robot ELEC-RZ (ULVAC Sales Co., Ltd.)
Various power supplies/robot related vacuum transfer robot ELEC-RZ-ELEC-RZ
Various power supplies/robot related vacuum transfer robot ELEC-RZ-ULVAC Sales Co., Ltd.

Various power supplies/robot related vacuum transfer robot ELEC-RZ
ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

125.8hours

About This Product

■Summary

ELEC-RZ is a high vacuum compatible transfer robot that is compact and low cost based on the excellent functions and performance of the COVOT series.

■Applications

・Automatic wafer transport in various semiconductor equipment ・Substrate transport in various vacuum experiment equipment

■Features

・A magnetic fluid seal is used for the vacuum seal, making it compatible with high vacuums up to 10^-6Pa. - The actuator has been made smaller to make it more compact and easier to install in equipment. -A variety of arms are available depending on stroke, turning radius, number of hands, etc. - Equipped with a multi-function display teaching pendant with excellent operability.

  • Product

    Various power supplies/robot related vacuum transfer robot ELEC-RZ

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1 Models of Various power supplies/robot related vacuum transfer robot ELEC-RZ

Image Part Number Price (excluding tax) Repeated position accuracy Lifting/lowering Repeated position accuracy Rotation Repeated position accuracy Expansion/contraction Minimum turning diameter Maximum reach distance Lifting stroke Rotation angle Payload (including hand) Operating speed Lifting/lowering Operating speed Turning Operating speed Telescoping Working pressure range Teaching pendant Controller Number of wafers held Wafer size
Various power supplies/robot related vacuum transfer robot ELEC-RZ-Part Number-ELEC-RZ

ELEC-RZ

Available upon quote

±0.2mm

±0.2mm

±0.1mm

944mm by mounting arm

1,050mm

50mm

±210º

1kg

Max 1.5sec/20mm

Max 3.0sec/180º

Max 2.5sec/full stroke

Atmospheric pressure ~10^-6Pa

Attached

Separately placed

1 piece/2 pieces

200mm/300mm

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About Company Handling This Product

ULVAC Sales Co., Ltd.

Response Rate

100.0%

Response Time

125.8hrs

  • Japan

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