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Various power supplies/robot related Vacuum transfer robot Vacuum transfer platform NCH series-Vacuum transfer platform NCH series
Various power supplies/robot related Vacuum transfer robot Vacuum transfer platform NCH series-ULVAC Sales Co., Ltd.

Various power supplies/robot related Vacuum transfer robot Vacuum transfer platform NCH series
ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

125.8hours


About This Product

■Summary

The NCH series is a vacuum transfer platform that combines a robot with a transfer core chamber/load lock chamber, etc.

■Applications

・Automatic wafer transport in various semiconductor equipment ・Substrate transport in various vacuum experiment equipment

■Features

- You can choose from a wide range of connection ports, from 4 (quadragonal) to up to 8 (octagonal). - Equipped as standard with a load lock chamber compatible with 25-stage cassettes. -A wide variety of options are available, including exhaust systems and vacuum gauges.

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    Various power supplies/robot related Vacuum transfer robot Vacuum transfer platform NCH series

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1 Models of Various power supplies/robot related Vacuum transfer robot Vacuum transfer platform NCH series

Image Part Number Price (excluding tax) Onboard robot Number of connection ports Exhaust system/vacuum gauge Load lock Wafer size
Various power supplies/robot related Vacuum transfer robot Vacuum transfer platform NCH series-Part Number-Vacuum transfer platform NCH series

Vacuum transfer platform NCH series

Available upon quote

ELEC (COVOT)

4~8

Option

25-tier cassette lifting type

Maximum 300mm

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About Company Handling This Product

Response Rate

100.0%


Response Time

125.8hrs

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