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  4. Various power supplies/robot related vacuum transfer robot COVOT-6 (ULVAC Sales Co., Ltd.)
Various power supplies/robot related vacuum transfer robot COVOT-6-COVOT-6
Various power supplies/robot related vacuum transfer robot COVOT-6-ULVAC Sales Co., Ltd.

Various power supplies/robot related vacuum transfer robot COVOT-6
ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

125.8hours

About This Product

■Summary

COVOT-6 is a vacuum transfer robot that has four independent arms and achieves high throughput.

■Applications

・Automatic wafer transport in various semiconductor equipment ・Substrate transport in various vacuum experiment equipment

■Features

-Equipped with 4 independent arms, allowing for simultaneous replacement of 2 boards. - It has a 7-axis actuator, and teaching can be performed with each of the 4 arms. - Equipped with AWS function (automatic board position correction function) as standard. - Compatible with medium vacuum of 10^-1Pa.

  • Product

    Various power supplies/robot related vacuum transfer robot COVOT-6

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1 Models of Various power supplies/robot related vacuum transfer robot COVOT-6

Image Part Number Price (excluding tax) Repeated position accuracy Lifting/lowering Repeated position accuracy Rotation Repeated position accuracy Expansion/contraction Minimum turning diameter Maximum reach distance Lifting stroke Rotation angle Payload (including hand) Operating speed Lifting/lowering Operating speed Turning Operating speed Telescoping Working pressure range Teaching pendant Controller Number of wafers held Wafer size
Various power supplies/robot related vacuum transfer robot COVOT-6-Part Number-COVOT-6

COVOT-6

Available upon quote

±0.2mm

±0.2mm

±0.2mm

980mm

880mm

90mm

360º endless

1kg

Max 1.5sec/20mm

Max 2.0sec/180º

Max 1.5sec/full stroke

Atmospheric pressure ~10^-1Pa

Attached

Separately placed

4 pieces

300mm

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About Company Handling This Product

ULVAC Sales Co., Ltd.

Response Rate

100.0%

Response Time

125.8hrs

  • Japan

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