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  4. Various power supplies/robot related Vacuum transfer robot COVOT-LC (ULVAC Sales Co., Ltd.)
Various power supplies/robot related Vacuum transfer robot COVOT-LC-COVOT-LC
Various power supplies/robot related Vacuum transfer robot COVOT-LC-ULVAC Sales Co., Ltd.

Various power supplies/robot related Vacuum transfer robot COVOT-LC
ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

125.8hours

About This Product

■Summary

COVOT-LC is a simple and affordable vacuum transfer robot that does not have a Z-axis.

■Applications

・Automatic wafer transport in various semiconductor equipment ・Substrate transport in various vacuum experiment equipment

■Features

・It is a simple 2-axis robot without a Z-axis. - Built-in controller allows for a compact equipment layout. - Compatible with high vacuum of 10^-5Pa.

  • Product

    Various power supplies/robot related Vacuum transfer robot COVOT-LC

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1 Models of Various power supplies/robot related Vacuum transfer robot COVOT-LC

Image Part Number Price (excluding tax) Repeated position accuracy Rotation Repeated position accuracy Expansion/contraction Minimum turning diameter Maximum reach distance Rotation angle Payload (including hand) Operating speed Turning Operating speed Telescoping Working pressure range Teaching pendant Controller Number of wafers held Wafer size
Various power supplies/robot related Vacuum transfer robot COVOT-LC-Part Number-COVOT-LC

COVOT-LC

Available upon quote

±0.2mm

±0.2mm

By 802mm mounting arm

800mm

-15º~375º

1kg

Max 2.5sec/180º

Max 2.5sec/full stroke

Atmospheric pressure ~10^-5Pa

Option

Built-in

1 piece/2 pieces

200mm/300mm

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About Company Handling This Product

ULVAC Sales Co., Ltd.

Response Rate

100.0%

Response Time

125.8hrs

  • Japan

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