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  4. Various power supplies/robot related Vacuum transfer robot COVOT (ULVAC Sales Co., Ltd.)
Various power supplies/robot related Vacuum transfer robot COVOT-COVOT
Various power supplies/robot related Vacuum transfer robot COVOT-ULVAC Sales Co., Ltd.

Various power supplies/robot related Vacuum transfer robot COVOT
ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

125.8hours

About This Product

■Summary

COVOT is a high-vacuum compatible transfer robot with high rigidity and excellent positioning accuracy, designed based on many years of experience and technology.

■Applications

・Automatic wafer transport in various semiconductor equipment ・Substrate transport in various vacuum experiment equipment

■Features

・A magnetic fluid seal is used for the vacuum seal, making it compatible with high vacuums up to 10^-6Pa. - Built-in controller allows for a compact equipment layout. - AWS function (automatic board position correction function) can be added as an option. ・There are no restrictions on the rotation movement, and it can rotate 360º, so there are no restrictions on the mounting direction.

  • Product

    Various power supplies/robot related Vacuum transfer robot COVOT

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1 Models of Various power supplies/robot related Vacuum transfer robot COVOT

Image Part Number Price (excluding tax) Repeated position accuracy Lifting/lowering Repeated position accuracy Rotation Repeated position accuracy Expansion/contraction Minimum turning diameter Maximum reach distance Lifting stroke Rotation angle Payload (including hand) Operating speed Lifting/lowering Operating speed Turning Operating speed Telescoping Working pressure range Teaching pendant Controller Number of wafers held Wafer size
Various power supplies/robot related Vacuum transfer robot COVOT-Part Number-COVOT

COVOT

Available upon quote

±0.2mm

±0.2mm

±0.2mm

944mm by mounting arm

1,050mm

50mm

360º endless

1kg

Max 1.5sec/20mm

Max 2.5sec/180º

Max 2.5sec/full stroke

Atmospheric pressure ~10^-6Pa

Attached

Built-in

1 piece/2 pieces

200mm/300mm

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About Company Handling This Product

ULVAC Sales Co., Ltd.

Response Rate

100.0%

Response Time

125.8hrs

  • Japan

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