Various power supplies/robot related EB gun for metal deposition EGN series
ULVAC Sales Co., Ltd.
About This Product
■Summary
The EGN series is an electron beam evaporation source for metal deposition that was newly developed with a focus on improving maintainability. The adoption of a flat top structure and 15mm hearth deck reduces the area of film deposited on the electron beam evaporation source, achieving high maintainability.
■Applications
Evaporation source for electron beam evaporation
■Features
・With flat top structure and 15mm hearth deck, less film is deposited on the electron beam evaporation source and cleaning is easy.
・By adopting a new emitter structure, the number of parts has been reduced by 60% compared to conventional models, making assembly easy.
・Select ribbon beam, which is most suitable for metal vapor deposition, and spot beam, which is most suitable for oxides/compounds.
・Feeding back the know-how accumulated as an equipment manufacturer to the design
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Product
Various power supplies/robot related EB gun for metal deposition EGN series
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Handling Company
ULVAC Sales Co., Ltd.
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Categories
1 Models of Various power supplies/robot related EB gun for metal deposition EGN series
| Product Image | Part Number | Price (excluding tax) |
|---|---|---|
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EGN-206M |
Available upon quote |
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About Company Handling This Product
- Japan