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  2. Machining / Machine Tools
  3. Vacuum Vapor Deposition Devices
  4. Various power supplies/robot related EB gun for metal deposition EGN series (ULVAC Sales Co., Ltd.)
Various power supplies/robot related EB gun for metal deposition EGN series-EGN-206M
Various power supplies/robot related EB gun for metal deposition EGN series-ULVAC Sales Co., Ltd.

Various power supplies/robot related EB gun for metal deposition EGN series
ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

125.8hours

About This Product

■Summary

The EGN series is an electron beam evaporation source for metal deposition that was newly developed with a focus on improving maintainability. The adoption of a flat top structure and 15mm hearth deck reduces the area of ​​film deposited on the electron beam evaporation source, achieving high maintainability.

■Applications

Evaporation source for electron beam evaporation

■Features

・With flat top structure and 15mm hearth deck, less film is deposited on the electron beam evaporation source and cleaning is easy. ・By adopting a new emitter structure, the number of parts has been reduced by 60% compared to conventional models, making assembly easy. ・Select ribbon beam, which is most suitable for metal vapor deposition, and spot beam, which is most suitable for oxides/compounds. ・Feeding back the know-how accumulated as an equipment manufacturer to the design

  • Product

    Various power supplies/robot related EB gun for metal deposition EGN series

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1 Models of Various power supplies/robot related EB gun for metal deposition EGN series

Image Part Number Price (excluding tax) Electron beam deflection angle Weight External dimensions (W×D×H) Cooling water amount Number of crucibles Crucible capacity
Various power supplies/robot related EB gun for metal deposition EGN series-Part Number-EGN-206M

EGN-206M

Available upon quote

270º

28kg

267mm×343mm×150mm

10L/min

6

20cc

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About Company Handling This Product

ULVAC Sales Co., Ltd.

Response Rate

100.0%

Response Time

125.8hrs

  • Japan

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