Various power supplies/robot related power supply for film deposition/EB gun RF power supply RFS-N series-RFS-1305N

EB gun RF power supply RFS-N series
ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

125.8hours

About This Product

■SummaryThe RFS-N series is a 13.56MHz RF power supply for plasma processes with an output of 0.5kW/1/kW/3kW/5kW. Equipped with a high-efficiency RF amplifier, it is compact and lightweight. Furthermore, the RF power supply has a built-in auto-matching controller function, so it is possible to control the power of the RF power supply and the matching system using only the main unit.

■Applications・Sputtering equipment
・CVD equipment
・Plasma etching equipment
・RF ion source
・Neutralizer

Features
■High efficiency amplifier adoptedConstructs an RF circuit with high power conversion efficiency to save energy

■High-speed auto matchingPerforms high-speed auto-matching using high-speed algorithms

■Built-in auto matching function in RF power supply- Matching system control is possible using only the main unit.
・Manual operation of the RF power supply and matching box is also possible with the built-in controller.

■Supports flexible control formatsExternal analog control and serial communication control possible

■High reliabilityFeedback of know-how accumulated as an equipment manufacturer to design

Model
There is 1 model available for this product.

Product
Various power supplies/robot related power supply for film deposition/EB gun RF power supply RFS-N series

Handling Company
ULVAC Sales Co., Ltd.

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1 Models of Various power supplies/robot related power supply for film deposition/EB gun RF power supply RFS-N series

Image	Part Number	Price (excluding tax)	Mass	Dimensions (W x D x H)	Control compensation range	Control Control accuracy	Control Control method	Cooling method	Matching box mass	Matching box residual reflected wave power	Matching box format	Matching box external dimensions W×D×H	Matching box cooling method	Matching box RF output Load impedance	Matching box RF output Allowable output current	Matching box RF output Allowable output voltage	Matching box RF input Rated power	Matching box RF input input connection	Matching box RF input Input frequency	Power generator output specifications Harmonic distortion rate	Power generator output specifications Oscillation frequency	Power generator output specifications Maximum reflected wave power	Power generator output specifications Rated traveling wave power	Power generator output specifications Output connections	Power generator output specifications Output impedance	Power generator input specifications Number of phases/frequency	Power generator input specifications Leakage current	Power generator input specifications Input current	Power generator input specifications Input voltage fluctuation range	Power generator input specifications Input connections	Power generator input specifications Input capacity	Power generator input specifications Input rated voltage
	RFS-1305N	Available upon quote	Approximately 11kg	240mm x 495mm x 150mm (excluding protrusions)	10~100% of rated power value	±2% or less of rated output (10~100% of rated power value)	Constant power control	Air cooling Flow rate 4L/min	MBX-1305N/1310N: Approx. 8kg MBX-1330N: Approx. 10kg MBX-1350N: Approx. 21kg	0.3% or less of input traveling wave power or 10W or less (MBX-1305N/1310N) /30W or less (MBX-1330N) /50W or less (MBX-1350N), whichever is greater	MBX-1305N/1310N MBX-1330N MBX-1350N	MBX-1305N/1310N: 375mm x 250mm x 120mm MBX-1330N: 375mm x 250mm x 170mm MBX-1350N: 450mm x 500mm x 248mm (Not including protrusions)	MBX-1305N/1310N, MBX-1330N: Air cooling MBX-1350N: Air cooling + water cooling (flow rate 2L/min)	Real part: 0.5Ω ≦ R ≦ 10.0Ω (within the specified voltage and current range)	MBX-1305N/1310N: 30A or less MBX-1330N: 80A or less MBX-1350N: 120A or less	MBX-1305N/1310N: 2.5kVpp or less/2.5kVdc or less MBX-1330N: 5.0kVpp or less/2.5kVdc or less MBX-1350N: 10kVpp or less/2.5kVdc or less	MBX-1305N/1310N: 50~1,000W MBX-1330N: 30~3,000W MBX-1350N: 50~5,000W	MBX-1330N: HN type MBX-1350N: DIN 7/16 type	13.56MHz	-35dB or less (in continuous mode at rated output)	13.56MHz	100W	500W (at 50Ω load)	N type	50Ω	Single phase 50/60Hz	5mA or less	10A or less	AC180~242V	DCA3102E16-10P-D (bayonet locking round receptacle)	1.2 kVA or less	AC200 to 220V

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About Company Handling This Product

ULVAC Sales Co., Ltd.

Response Rate

100.0%

Response Time

125.8hrs

Japan

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Various power supplies/robot related power supply for film deposition/EB gun RF power supply RFS-N series ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.'s Response Status

About This Product

■Summary

■Applications

■High efficiency amplifier adopted

■High-speed auto matching

■Built-in auto matching function in RF power supply

■Supports flexible control formats

■High reliability

1 Models of Various power supplies/robot related power supply for film deposition/EB gun RF power supply RFS-N series

RFS-1305N

Other products of ULVAC Sales Co., Ltd.

About Company Handling This Product

Various power supplies/robot related power supply for film deposition/EB gun RF power supply RFS-N series
ULVAC Sales Co., Ltd.