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  2. Various power supplies/robot related Power supply for film deposition/EB gun Abnormal discharge prevention unit A2K series (ULVAC Sales Co., Ltd.)
Various power supplies/robot related Power supply for film deposition/EB gun Abnormal discharge prevention unit A2K series-A2KH-25
Various power supplies/robot related Power supply for film deposition/EB gun Abnormal discharge prevention unit A2K series-ULVAC Sales Co., Ltd.

Various power supplies/robot related Power supply for film deposition/EB gun Abnormal discharge prevention unit A2K series
ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

125.8hours

About This Product

■Summary

The A2K series is an abnormal discharge prevention unit that neutralizes the charge on the target by applying pulses of positive voltage to the DC power supply in the reactive sputtering process. It can be easily installed on existing equipment, and improves yield and throughput at low cost.

■Applications

・Reactive sputtering equipment for FPD ・Reactive sputtering equipment for industrial coatings ・Reactive sputtering equipment for color TFT Features

■High throughput

High power input is possible by reducing abnormal discharge

■Reducing board damage

Possible to reduce board damage caused by arc

■Suppression of substrate temperature

Substrate temperature can be suppressed compared to RF sputtering

■Simple connectivity

Can also be connected to existing equipment (can be connected to our DC power supply)

■Reverse pulse frequency can be changed

A2KH-25/50: 1kHz to 20kHz, A2K-20K/40K: Possible in the range of 1kHz to 50kHz

■Pulse synchronization system

Output pulse synchronization of multiple A2Ks is possible *Pulse synchronization and parallel operation cannot be performed by mixed use of A2KH-25, 50, A2K-20K, and 40K. *A2KH-25/50 requires external synchronization unit (PHSM/PHSS)

■Capacity can be increased by master-slave connection

A2K-20K and 40K can be operated in parallel up to 6 units each.

■Application: Pulse synchronization system

If the cathodes are close to each other in the same chamber and the cathodes are facing each other, or if the discharges of multiple A2Ks are interfering, use the phase control function to make the reverse pulses of the A2Ks in phase and eliminate the discharge interference. It is possible to prevent it. *A2KH-25/50 requires external synchronization unit (PHSM/PHSS) *A2K-20K/40K requires optical synchronous cable (Pulse link cable)

  • Product

    Various power supplies/robot related Power supply for film deposition/EB gun Abnormal discharge prevention unit A2K series

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1 Models of Various power supplies/robot related Power supply for film deposition/EB gun Abnormal discharge prevention unit A2K series

Image Part Number Price (excluding tax) Compatible standards Mass Continuous pressure resistance External dimensions (W×D×H) Operating environment Operating ambient temperature Control power input input power Control power input input leakage current Control power input input frequency Control power input input Output specifications Reverse pulse voltage Output specifications Oscillation frequency Output specifications Pulse width Cooling method Input specifications Operating current Input specifications Operating voltage Input specifications Input structure
Various power supplies/robot related Power supply for film deposition/EB gun Abnormal discharge prevention unit A2K series-Part Number-A2KH-25

A2KH-25

Available upon quote

RoHs directive

16kg

-1,500Vdc

238×450×149mm

Avoid direct sunlight, heat, dust, and vibration, and do not contain corrosive gases.

5℃~40℃ (no condensation)

100VA

1mA or less

Single phase 50/60Hz 50/60Hz

AC90~110V

10~20% of DC power output voltage (depending on load impedance)

・Frequency when pulse width 5μs is selected:
2, 5, 10, 15, 20kHz
・Frequency when pulse width 10μs is selected:
1, 2.5, 5, 7.5, 10kHz

5μs/10μs Switchable by internal switch

Forced air cooling

0~25A

-100~-800V

Connector connection

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About Company Handling This Product

ULVAC Sales Co., Ltd.

Response Rate

100.0%

Response Time

125.8hrs

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