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Various power supplies/robot related Power supply for film deposition/EB gun Dual cathode bipolar unit MFU-20K-MFU-20K
Various power supplies/robot related Power supply for film deposition/EB gun Dual cathode bipolar unit MFU-20K-ULVAC Sales Co., Ltd.

Various power supplies/robot related Power supply for film deposition/EB gun Dual cathode bipolar unit MFU-20K
ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

125.8hours


About This Product

■Summary

The MFU-20K is a unit that converts DC output to bipolar pulse output by adding it to a ULVAC DC power supply. Achieves improved yield and throughput at low cost.

■Applications

・Reactive sputtering equipment for FPD ・Reactive sputtering equipment for industrial coatings ・Reactive sputtering equipment for color TFT ・General sputtering equipment Features

■Wide frequency range

Possible in the range of 10kHz to 100kHz

■Large capacity possible with master/slave connection

Up to 6 units can be operated in parallel

■DC output is also possible

The output of the input DC power supply can be directly applied to the cathode.

  • Product

    Various power supplies/robot related Power supply for film deposition/EB gun Dual cathode bipolar unit MFU-20K

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1 Models of Various power supplies/robot related Power supply for film deposition/EB gun Dual cathode bipolar unit MFU-20K

Image Part Number Price (excluding tax) Compatible standards Mass External dimensions (W×D×H) Operating environment Operating ambient temperature Control power input Number of phases, frequency Control power input fluctuation range Control power input input voltage Control power input input capacity Output specifications Oscillation frequency Output specifications Maximum output current Output specifications Maximum output voltage Output specifications duty Output specifications Ignition voltage Cooling method Input specifications Operating current Input specifications Operating voltage Input specifications Ignition voltage
Various power supplies/robot related Power supply for film deposition/EB gun Dual cathode bipolar unit MFU-20K-Part Number-MFU-20K

MFU-20K

Available upon quote

CE/SEMI F47/RoHS Directive

37kg

483mm x 630mm x 177mm (excluding protrusions)

Overvoltage category II, pollution degree II, avoid direct sunlight, heat, dust, and vibration, and do not contain corrosive gases.

5℃~40℃ (no condensation)

Single phase 50/60Hz

AC90~264V

AC100V/AC240V

400VA

10k~100kHz

50A

1,000V (RMS)

10~90%

DC-1,200V

Forced air cooling

50A

0~-1,000V

-1,200V

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About Company Handling This Product

Response Rate

100.0%


Response Time

125.8hrs

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