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  4. Various power supplies/robot related Power supply for film deposition/EB gun DC power supply for sputtering DCS series (ULVAC Sales Co., Ltd.)
Various power supplies/robot related Power supply for film deposition/EB gun DC power supply for sputtering DCS series-DCS0052B
Various power supplies/robot related Power supply for film deposition/EB gun DC power supply for sputtering DCS series-ULVAC Sales Co., Ltd.

Various power supplies/robot related Power supply for film deposition/EB gun DC power supply for sputtering DCS series
ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

125.8hours

About This Product

■Summary

The DCS series of DC power supplies for sputtering has excellent cost performance as well as basic performance, and can be used in a wide range of fields. In addition, when combined with the abnormal discharge prevention unit (A2K), it fully demonstrates its power in reactive sputtering.

■Applications

It can be used as a bias DC power source for sputtering metals such as Al and Ni.

■Features

・Improved output controllability (can be operated at 1 to 100% of rating) ・Wide output range without tap switching ・Equipped with two types of abnormal discharge detection functions as standard ・External noise countermeasures by isolation (optional) ・3 operation modes (constant power, constant current, constant voltage control) can be selected ・Floating possible up to +100V

  • Product

    Various power supplies/robot related Power supply for film deposition/EB gun DC power supply for sputtering DCS series

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1 Models of Various power supplies/robot related Power supply for film deposition/EB gun DC power supply for sputtering DCS series

Image Part Number Price (excluding tax) Mass Maximum output power External dimensions (WDH) mm Output range current Output range voltage Output range power
Various power supplies/robot related Power supply for film deposition/EB gun DC power supply for sputtering DCS series-Part Number-DCS0052B

DCS0052B

Available upon quote

9kg

500W

240x450x99

0.0012A~1.25A

80V~800V

5W~500W

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About Company Handling This Product

ULVAC Sales Co., Ltd.

Response Rate

100.0%

Response Time

125.8hrs

  • Japan

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