Various power supplies/robot related Power supply for film deposition/EB gun DC power supply for sputtering DCS series-DCS0052B
Various power supplies/robot related Power supply for film deposition/EB gun DC power supply for sputtering DCS series-ULVAC Sales Co., Ltd.

Various power supplies/robot related Power supply for film deposition/EB gun DC power supply for sputtering DCS series
ULVAC Sales Co., Ltd.


About This Product

■Summary The DCS series of DC power supplies for sputtering has excellent cost performance as well as basic performance, and can be used in a wide range of fields. In addition, when combined with the abnormal discharge prevention unit (A2K), it fully demonstrates its power in reactive sputtering. ■Applications It can be used as a bias DC power source for sputtering metals such as Al and Ni. ■Features ・Improved output controllability (can be operated at 1 to 100% of rating) ・Wide output range without tap switching ・Equipped with two types of abnormal discharge detection functions as standard ・External noise countermeasures by isolation (optional) ・3 operation modes (constant power, constant current, constant voltage control) can be selected ・Floating possible up to +100V

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    Various power supplies/robot related Power supply for film deposition/EB gun DC power supply for sputtering DCS series

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1 Models of Various power supplies/robot related Power supply for film deposition/EB gun DC power supply for sputtering DCS series

Product Image Part Number Price (excluding tax)
Various power supplies/robot related Power supply for film deposition/EB gun DC power supply for sputtering DCS series-Part Number-DCS0052B

DCS0052B

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