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Various power supplies/robot related power supply for film deposition/EB gun DC power supply DC-10/DC-20-DC-10
Various power supplies/robot related power supply for film deposition/EB gun DC power supply DC-10/DC-20-ULVAC Sales Co., Ltd.

Various power supplies/robot related power supply for film deposition/EB gun DC power supply DC-10/DC-20
ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

125.8hours


About This Product

■Summary

DC-10 and DC-20 are DC power supplies for sputtering with 10kW and 20kW output. It is composed of reliable parts and circuits. This is a highly reliable power supply that is ideal for plasma loads, and its design reflects the know-how accumulated over many years, including power supply applications.

■Applications

・Sputtering equipment for FPD ・Semiconductor sputtering equipment ・Sputtering equipment for touch panels ・Sputtering equipment for industrial coatings Features

■Lightweight and space saving

Lightweight and space-saving design with excellent installation ease.

■Output voltage range can be selected

In addition to the 800V specification, the 1,000V specification is also available.

■Abundant arc handling

A wide variety of arc control methods that are well-versed in plasma.

■No need for cooling water

No cooling water is required due to the forced air cooling system.

■Can be equipped with a high-speed arc cutoff circuit

Achieves low arc energy even as standard. Furthermore, a high-speed arc cutoff circuit can be installed as an option.

■Can be equipped with free parallel operation function

DC-10, DC-20: Optional parallel operation function allows parallel operation of up to 12 units by freely combining 10kW and 20kW. (Max 240kW)

  • Product

    Various power supplies/robot related power supply for film deposition/EB gun DC power supply DC-10/DC-20

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1 Models of Various power supplies/robot related power supply for film deposition/EB gun DC power supply DC-10/DC-20

Image Part Number Price (excluding tax) Compatible standards Mass Number of phases, frequency Abnormal discharge control Maximum rated power Rated current Rated voltage External dimensions (W×D×H) Variation range Operating environment Operating ambient temperature Control accuracy Control method Control guarantee range Output polarity Output connection Cooling method Input voltage Input connection Input capacity Parallel operation
Various power supplies/robot related power supply for film deposition/EB gun DC power supply DC-10/DC-20-Part Number-DC-10

DC-10

Available upon quote

CE and SEMI F47

28kg

3 phase 50/60Hz

When abnormal discharge is detected, the inverter stops or the high-speed arc cutoff circuit shuts off.

10kW

25A

800V

483mm x 630mm x 133mm (excluding protrusions)

AC187~229V

Avoid direct sunlight, heat, dust, and vibration. Avoid corrosive gases.

10℃~40℃ (no condensation)

±1% or less of rated output

Constant power control (P control) / Constant current control (I control) / Constant voltage control (V control)

Constant power control 10~100% of rated power value

Negative polarity

Connector connection

Forced air cooling

AC208V

Connector connection

13.5kVA or less

Up to 12 units can be controlled by master/slave

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About Company Handling This Product

Response Rate

100.0%


Response Time

125.8hrs

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