Various power supplies/robot related power supply for film deposition/EB gun DC power supply DC-10/DC-20
ULVAC Sales Co., Ltd.
About This Product
■Summary
DC-10 and DC-20 are DC power supplies for sputtering with 10kW and 20kW output. It is composed of reliable parts and circuits. This is a highly reliable power supply that is ideal for plasma loads, and its design reflects the know-how accumulated over many years, including power supply applications.
■Applications
・Sputtering equipment for FPD
・Semiconductor sputtering equipment
・Sputtering equipment for touch panels
・Sputtering equipment for industrial coatings
Features
■Lightweight and space saving
Lightweight and space-saving design with excellent installation ease.
■Output voltage range can be selected
In addition to the 800V specification, the 1,000V specification is also available.
■Abundant arc handling
A wide variety of arc control methods that are well-versed in plasma.
■No need for cooling water
No cooling water is required due to the forced air cooling system.
■Can be equipped with a high-speed arc cutoff circuit
Achieves low arc energy even as standard. Furthermore, a high-speed arc cutoff circuit can be installed as an option.
■Can be equipped with free parallel operation function
DC-10, DC-20: Optional parallel operation function allows parallel operation of up to 12 units by freely combining 10kW and 20kW. (Max 240kW)
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Product
Various power supplies/robot related power supply for film deposition/EB gun DC power supply DC-10/DC-20
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Handling Company
ULVAC Sales Co., Ltd.
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Categories
1 Models of Various power supplies/robot related power supply for film deposition/EB gun DC power supply DC-10/DC-20
| Product Image | Part Number | Price (excluding tax) |
|---|---|---|
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DC-10 |
Available upon quote |
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About Company Handling This Product
- Japan