Analysis/Measurement Equipment Surface Analyzer Scanning Auger Electron Spectrometer (AES/SAM) PHI 4700 Thin Film Analyzer-PHI 4700 Thin Film Analyzer

SAM) PHI 4700 Thin Film Analyzer
ULVAC Sales Co., Ltd.

About This Product

■SummaryAuger Electron Spectroscopy (AES) is a method to obtain information about elemental composition by measuring the spectrum of Auger electrons emitted by irradiating a solid surface with an electron beam.

The PHI 4700 Thin Film Analyzer uses an energy analyzer with the world's highest Auger sensitivity of 1.6Mcps (current value 10nA) to achieve speedy depth analysis. The software uses SmartSoftTM, which has a reputation for ease of use, controls the SEM and Auger with a single computer, and boasts extensive Auger automatic measurement functions, including the world's first automatic Auger height adjustment function.

■Feature 1: Auger depth direction analysis with the best cost performanceThe PHI 4700 Thin Film Analyzer is an Auger electron spectrometer that exhibits particularly excellent cost performance for depth analysis of minute areas. Highly sensitive, short-time depth direction analysis of microscopic areas on the micron order specified on the SEM is possible.

■Feature 2: High-throughput measurement using a high-sensitivity analyzer and automatic measurementThe PHI 4700 Thin Film Analyzer's high sensitivity analyzer reduces measurement time.

Furthermore, it is equipped with an automatic measurement function, making it a highly productive device that can measure a large number of samples in a short time. Automatic measurements can be easily performed by anyone, and measurement positions can be registered by simply clicking on the sample holder displayed on the software screen. It is also possible to obtain data necessary for comprehensive analysis for product/process management.

*There are other features as well.

Model
There is 1 model available for this product.

Product
Analysis/Measurement Equipment Surface Analyzer Scanning Auger Electron Spectrometer (AES/SAM) PHI 4700 Thin Film Analyzer

Handling Company
ULVAC Sales Co., Ltd.

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1 Models of Analysis/Measurement Equipment Surface Analyzer Scanning Auger Electron Spectrometer (AES/SAM) PHI 4700 Thin Film Analyzer

Image	Part Number	Price (excluding tax)	Electron source	Detector	Sensitivity	Ultimate vacuum	Software	Stage	Option
	PHI 4700 Thin Film Analyzer	Available upon quote	LaB6	Multi-channel detector (16 channels)	1.6Mcps (Cu LMM) @10 kV, 10nA, △E/E:0.4%	6.7×10^-8 Pa or less	SmartSoft™ (measurement software Windows^®XP) PHI MultiPak™ (analysis software Windows^®XP)	5 axis motor control	Cooling and heating stage, transfer vessel, oxygen leak mechanism, etc.

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About Company Handling This Product

ULVAC Sales Co., Ltd.

Japan

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Analysis/Measurement Equipment Surface Analyzer Scanning Auger Electron Spectrometer (AES/SAM) PHI 4700 Thin Film Analyzer ULVAC Sales Co., Ltd.

About This Product

■Summary

■Feature 1: Auger depth direction analysis with the best cost performance

■Feature 2: High-throughput measurement using a high-sensitivity analyzer and automatic measurement

1 Models of Analysis/Measurement Equipment Surface Analyzer Scanning Auger Electron Spectrometer (AES/SAM) PHI 4700 Thin Film Analyzer

PHI 4700 Thin Film Analyzer

Customers who viewed this product also viewed

Other products of ULVAC Sales Co., Ltd.

About Company Handling This Product

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Analysis/Measurement Equipment Surface Analyzer Scanning Auger Electron Spectrometer (AES/SAM) PHI 4700 Thin Film Analyzer
ULVAC Sales Co., Ltd.