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Analysis/Measurement Equipment Surface Analyzer Scanning Auger Electron Spectrometer (AES/SAM) PHI 4700 Thin Film Analyzer-PHI 4700 Thin Film Analyzer
Analysis/Measurement Equipment Surface Analyzer Scanning Auger Electron Spectrometer (AES/SAM) PHI 4700 Thin Film Analyzer-ULVAC Sales Co., Ltd.

Analysis/Measurement Equipment Surface Analyzer Scanning Auger Electron Spectrometer (AES/SAM) PHI 4700 Thin Film Analyzer
ULVAC Sales Co., Ltd.


About This Product

■Summary

Auger Electron Spectroscopy (AES) is a method to obtain information about elemental composition by measuring the spectrum of Auger electrons emitted by irradiating a solid surface with an electron beam. The PHI 4700 Thin Film Analyzer uses an energy analyzer with the world's highest Auger sensitivity of 1.6Mcps (current value 10nA) to achieve speedy depth analysis. The software uses SmartSoftTM, which has a reputation for ease of use, controls the SEM and Auger with a single computer, and boasts extensive Auger automatic measurement functions, including the world's first automatic Auger height adjustment function.

■Feature 1: Auger depth direction analysis with the best cost performance

The PHI 4700 Thin Film Analyzer is an Auger electron spectrometer that exhibits particularly excellent cost performance for depth analysis of minute areas. Highly sensitive, short-time depth direction analysis of microscopic areas on the micron order specified on the SEM is possible.

■Feature 2: High-throughput measurement using a high-sensitivity analyzer and automatic measurement

The PHI 4700 Thin Film Analyzer's high sensitivity analyzer reduces measurement time. Furthermore, it is equipped with an automatic measurement function, making it a highly productive device that can measure a large number of samples in a short time. Automatic measurements can be easily performed by anyone, and measurement positions can be registered by simply clicking on the sample holder displayed on the software screen. It is also possible to obtain data necessary for comprehensive analysis for product/process management. *There are other features as well.

  • Product

    Analysis/Measurement Equipment Surface Analyzer Scanning Auger Electron Spectrometer (AES/SAM) PHI 4700 Thin Film Analyzer

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1 Models of Analysis/Measurement Equipment Surface Analyzer Scanning Auger Electron Spectrometer (AES/SAM) PHI 4700 Thin Film Analyzer

Image Part Number Price (excluding tax) Electron source Detector Sensitivity Ultimate vacuum Software Stage Option
Analysis/Measurement Equipment Surface Analyzer Scanning Auger Electron Spectrometer (AES/SAM) PHI 4700 Thin Film Analyzer-Part Number-PHI 4700 Thin Film Analyzer

PHI 4700 Thin Film Analyzer

Available upon quote

LaB6

Multi-channel detector (16 channels)

1.6Mcps (Cu LMM) @10 kV, 10nA, △E/E:0.4%

6.7×10^-8 Pa or less

SmartSoft™ (measurement software Windows^®XP)
PHI MultiPak™ (analysis software Windows^®XP)

5 axis motor control

Cooling and heating stage, transfer vessel, oxygen leak mechanism, etc.

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