Analysis/Measurement Equipment Surface Analyzer Scanning Auger Electron Spectrometer (AES/SAM) PHI 710-PHI 710

SAM) PHI 710
ULVAC Sales Co., Ltd.

About This Product

■SummaryAuger electron spectroscopy (AES) is an analytical method that measures the energy of Auger electrons emitted when a sample is irradiated with an electron beam to obtain the elemental composition and distribution of the sample surface.

The PHI 710 scanning Auger electron spectrometer is the only Auger analyzer in the world that guarantees an Auger electron spatial resolution of 8 nm or less. Equipped with an acoustic enclosure as standard, it is now possible to perform Auger analysis with a low drift of 500,000 times (measuring conditions in which the measurement position hardly moves), which was impossible with conventional Auger analysis, and allows microscopic measurement at the true nanometer level. Achieves partial Auger analysis.

Features
■Feature 1 SEM resolution ≦ 3 nm, AES resolution ≦ 8 nmIn Auger analysis, after identifying the analysis position through SEM observation, we perform analysis such as spectrum, depth, and map measurements. SEM observation requires a narrow, focused electron beam, and Auger analysis requires an electron beam that is extremely stable during measurement at a current that allows Auger analysis.

The PHI 710 has a lower noise power supply and has achieved an SEM resolution of 3 nm or less. In addition, an acoustic enclosure is used to minimize the effects of vibration, sound, and temperature changes, allowing AES analysis with a resolution of 8 nm (20 kV 1 nA) or less.

■Feature 2 High sensitivity and high throughput analysis using coaxial cylindrical mirror analyzer (CMA)Coaxial cylindrical mirror analyzer. Coaxial CMA is PHI's original electron spectrometer with an electron gun placed on the central axis of the spectrometer. Since CMA can capture Auger electrons emitted in all 360-degree directions, it has the advantage of being less affected by sample shape and tilt angle.

■Feature 3 Chemical state mapping by AESSpectral map. PHI 710's AE map measurement makes it possible to obtain a spectral map that retains the spectrum for each pixel, realizing chemical state mapping based on spectral analysis.

Model
There is 1 model available for this product.

Product
Analysis/Measurement Equipment Surface Analyzer Scanning Auger Electron Spectrometer (AES/SAM) PHI 710

Handling Company
ULVAC Sales Co., Ltd.

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1 Models of Analysis/Measurement Equipment Surface Analyzer Scanning Auger Electron Spectrometer (AES/SAM) PHI 710

Image	Part Number	Price (excluding tax)	Sensitivity	Ultimate pressure	Software	Energy resolution	SEM image resolution (25kV)	AES spatial resolution (20kV, 1nA)	Option
	PHI 710	Available upon quote	700 kcps (CuLMM) @10 kV, 10 nA	6.7 × 10^-8 Pa or less	SmartSoft™-AES (measurement software) PHI MultiPak™ (analysis software)	0.5% or less (HR mode 0.1~0.5%)	≤3nm	≤8nm	6Specimen parking mechanism, sample cooling rupture mechanism, EBSD, backscattered electron detector, intro camera, intro cold cathode gauge, transfer vessel, thermo valve

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About Company Handling This Product

ULVAC Sales Co., Ltd.

Japan

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Analysis/Measurement Equipment Surface Analyzer Scanning Auger Electron Spectrometer (AES/SAM) PHI 710 ULVAC Sales Co., Ltd.

About This Product

■Summary

■Feature 1 SEM resolution ≦ 3 nm, AES resolution ≦ 8 nm

■Feature 2 High sensitivity and high throughput analysis using coaxial cylindrical mirror analyzer (CMA)

■Feature 3 Chemical state mapping by AES

1 Models of Analysis/Measurement Equipment Surface Analyzer Scanning Auger Electron Spectrometer (AES/SAM) PHI 710

PHI 710

Customers who viewed this product also viewed

Other products of ULVAC Sales Co., Ltd.

About Company Handling This Product

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Analysis/Measurement Equipment Surface Analyzer Scanning Auger Electron Spectrometer (AES/SAM) PHI 710
ULVAC Sales Co., Ltd.