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Multi-sensor CRTS-12NS for crystal oscillation type deposition controllerHandling Company
ULVAC Sales Co., Ltd.Image | Part Number | Price (excluding tax) | Sensor head weight | Sensor head heat resistant temperature | Number of crystals installed in sensor head | Sensor head compatible crystal | Sensor head dimensions | Sensor head cooling water amount | Controller part dimensions (W×D×H) | Controller section utility | Controller section digital output | Controller digital input |
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CRTS-12NS |
Available upon quote |
2kg |
350C° |
12 pieces |
5MHz, AT cut crystal |
Φ104mm x H approx. 61mm |
1L/min |
100mm x 252mm x 99mm |
DC24V, 3.0A |
Sensor No., BUSY, ERROR, RETRY, END |
INIT, CNT, STOP |
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