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Multi-sensor CRTS-M6 for crystal oscillation type deposition controllerHandling Company
ULVAC Sales Co., Ltd.| Image | Part Number | Price (excluding tax) | Sensor head weight | Sensor head heat resistant temperature | Number of crystals installed in sensor head | Sensor head compatible crystal | Sensor head dimensions | Sensor head cooling water amount | Controller part dimensions (W×D×H) | Controller section utility | Controller section digital output | Controller digital input |
|---|---|---|---|---|---|---|---|---|---|---|---|---|
|
CRTS-M6 |
Available upon quote |
1kg |
350C° |
6 pieces |
5MHz or 6MHz (selectable), AT cut crystal |
Φ50mm x H approx. 89mm |
1L/min |
100mm x 252mm x 99mm |
DC24V, 3.0A |
Sensor No., BUSY, ERROR, RETRY, END |
INIT, CNT, STOP |
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