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Multi-sensor CRTS-M6 for crystal oscillation type deposition controller-CRTS-M6
Multi-sensor CRTS-M6 for crystal oscillation type deposition controller-ULVAC Sales Co., Ltd.

Multi-sensor CRTS-M6 for crystal oscillation type deposition controller
ULVAC Sales Co., Ltd.


About This Product

■Summary

CRTS-M6 is a rotary multi-sensor developed for the crystal oscillation film deposition controller CRTM series. It can be equipped with six 5MHz or 6MHz crystals, so it can be used safely for continuous deposition.

■Applications

・Vapor deposition of optical and optical communication components ・Deposition of organic matter ・Electronic parts and other vapor deposition

■Features

・Can be equipped with 6 5MHz or 6MHz crystals ・Achieves high reliability with a unique drive system that uses a vacuum motor ・Crystal replacement is easy as the holder can be removed and attached. ・It is possible to detect crystal oscillation abnormality (end of life) and automatically switch crystals (when using the CRTM series as the controller) ・Since the sensor head is small (50mm in diameter), it is flexible to attach to vapor deposition equipment.

■Points to note when purchasing

・The oscillator is included when ordering the CRTS, but the external cable that connects the CRTM and the oscillator is sold separately (please specify the length) -For long-life CRTS, two cables are required: an external cable connecting the CRTM and the oscillator, and an oscillator control cable. Each sold separately (please specify length) ・When ordering CRTS, please specify the length from the lead-in terminal to the tip of the sensor (the included internal cable length will be automatically matched to the sensor length)

  • Product

    Multi-sensor CRTS-M6 for crystal oscillation type deposition controller

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1 Models of Multi-sensor CRTS-M6 for crystal oscillation type deposition controller

Image Part Number Price (excluding tax) Sensor head weight Sensor head heat resistant temperature Number of crystals installed in sensor head Sensor head compatible crystal Sensor head dimensions Sensor head cooling water amount Controller part dimensions (W×D×H) Controller section utility Controller section digital output Controller digital input
Multi-sensor CRTS-M6 for crystal oscillation type deposition controller-Part Number-CRTS-M6

CRTS-M6

Available upon quote

1kg

350C°

6 pieces

5MHz or 6MHz (selectable), AT cut crystal

Φ50mm x H approx. 89mm

1L/min

100mm x 252mm x 99mm

DC24V, 3.0A

Sensor No., BUSY, ERROR, RETRY, END

INIT, CNT, STOP

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