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  2. Crystal oscillation type deposition controller CRTM-6000G (ULVAC Sales Co., Ltd.)
Crystal oscillation type deposition controller CRTM-6000G-CRTM-6000G
Crystal oscillation type deposition controller CRTM-6000G-ULVAC Sales Co., Ltd.

Crystal oscillation type deposition controller CRTM-6000G
ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

125.8hours

About This Product

■Summary

CRTM-6000G is a crystal oscillation type deposition controller that has excellent resolution and can monitor and control deposition film thickness/rate. Despite its compact half-rack size body, it is capable of low rate control and continuous deposition control of up to 99 layers of multilayer films.

■Applications

Control of film thickness and deposition rate during deposition

■Features

・Excellent film thickness and film-forming rate resolution enables control even when the film-forming speed is low. - Fast sampling rate of 125ms allows for responsive control ・Multilayer film control possible up to 99 layers ・RS232C is standard equipment ・Up to two single sensors can be connected (switchable) ・Equipped with programmable digital input/output (12ch each) and analog output (3ch)

  • Product

    Crystal oscillation type deposition controller CRTM-6000G

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1 Models of Crystal oscillation type deposition controller CRTM-6000G

Image Part Number Price (excluding tax) Vapor deposition rate display range/display resolution Film thickness display range/display resolution Film thickness/measurement resolution Compatible sensor frequency Number of multilayer films External dimensions (W×D×H) Number of sensors that can be installed Number of deposition programs Digital input/output Sampling rate Analog output
Crystal oscillation type deposition controller CRTM-6000G-Part Number-CRTM-6000G

CRTM-6000G

Available upon quote

0.1 ~ 999.9Å/s/0.1Å/s

0.001kÅ ~ 999.9kÅ/1Å

0.041 Å (5 MHz)
0.029 Å (6 MHz)

5MHz, 6MHz

99 layers

240mm x 350mm x 99mm

Single sensor: 2 (simultaneous measurement not possible, switchable)
Multi-sensor: 1

99

Input: 12ch programmable
Output: 12ch programmable

125ms

3ch programmable

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About Company Handling This Product

ULVAC Sales Co., Ltd.

Response Rate

100.0%

Response Time

125.8hrs

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