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  2. Crystal oscillation type deposition controller CRTM-9200 (ULVAC Sales Co., Ltd.)
Crystal oscillation type deposition controller CRTM-9200-CRTM-9200
Crystal oscillation type deposition controller CRTM-9200-ULVAC Sales Co., Ltd.

Crystal oscillation type deposition controller CRTM-9200
ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

125.8hours

About This Product

■Summary

The CRTM-9200 is a successor to the CRTM-9100G, inheriting both functions and design, basically maintaining compatibility, and the viewing angle of the display is also the same. This is a crystal oscillation type film deposition controller that achieves low rate deposition control and highly accurate film thickness control with excellent film thickness and rate resolution (0.0022Å). With the addition of options, it is also possible to control the deposition of up to four elements simultaneously.

■Applications

Film thickness and rate control during vapor deposition

■Features

- Excellent film thickness and rate resolution (0.0022Å) make it ideal for low-rate deposition control. - Simultaneous vapor deposition control of four elements is possible. (When adding options) ・Multilayer film control of up to 99 layers is possible. - Programs can be saved to USB memory. ・Accurate film thickness measurement is possible, taking into account the history of the film deposited on the crystal plate. (MLC function)

  • Product

    Crystal oscillation type deposition controller CRTM-9200

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1 Models of Crystal oscillation type deposition controller CRTM-9200

Image Part Number Price (excluding tax) Vapor deposition rate display range/display resolution Film thickness display range/display resolution Film thickness/rate resolution Compatible sensor frequency Number of multilayer films External dimensions (W×D×H) mm Number of sensors that can be installed Number of deposition programs Digital input/output Sampling rate Analog output
Crystal oscillation type deposition controller CRTM-9200-Part Number-CRTM-9200

CRTM-9200

Available upon quote

0.001 ~ 999.9Å/s/0.001Å/s

0.001kÅ ~ 999.9kÅ/1Å

0.0034 Å (when using 4MHz crystal/quartz plate)
0.0022 Å (when using 5MHz crystal/using crystal plate)
0.0015 Å (When using 6MHz crystal/When using crystal plate)

4MHz, 5MHz, 6MHz

99 layers

480 x 318 x 149

2 (up to 8 with additional options)

128

Input: 12ch programmable
Output: 16ch programmable

250ms

POWER (0~0.99V), RATE and THK can be added as options

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About Company Handling This Product

ULVAC Sales Co., Ltd.

Response Rate

100.0%

Response Time

125.8hrs

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