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Analysis and measurement equipment Thin film measurement Stylus type profiler Alpha-Step D-500/D-600Handling Company
ULVAC Sales Co., Ltd.| Image | Part Number | Price (excluding tax) | Power supply | Needle pressure range | Stylus tip radius | Measurement length | Step measurement reproducibility | Dimensions (W×D×H)/Weight | Vertical measurement resolution (maximum) | Vertical measurement range (maximum) | Profile data points | Profile stitching | Stress measurement | Sample observation | Sample thickness (maximum) | Sample stage diameter | Auto leveling | Arc motion correction | Θ stage | XY stage movement range | OS | Apex 2D/3D analysis |
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Alpha-Step D-500 |
Available upon quote |
AC90-260V, 50/60Hz, 500VA |
0.03~15mg |
2μmR |
30mm |
1σ=0.5nm (1μm standard sample) |
250×390×240mm/13.6kg (main unit measurement part only, PC/monitor etc. not included) |
0.038nm (2.5μm range) |
1,200μm |
120,000 |
Standard |
Options (2D stress) |
Field of view 3.76 x 3.12mm, with 4X digital zoom, side view |
20mm |
140mm |
Standard (soft) |
Standard |
360°, manual |
80×20mm, manual |
Windows7 |
Options: 2D |
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