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Analysis and measurement equipment Thin film measurement Stylus type profiler Alpha-Step D-500/D-600-Alpha-Step D-500
Analysis and measurement equipment Thin film measurement Stylus type profiler Alpha-Step D-500/D-600-ULVAC Sales Co., Ltd.

Analysis and measurement equipment Thin film measurement Stylus type profiler Alpha-Step D-500/D-600
ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

125.8hours


About This Product

■Summary

Alpha-Step D-500/D-600 is a stylus profiler manufactured by KLA-Tencor that measures the step (film thickness), roughness, and shape of various sample surfaces with high precision. It has a wide range of specifications and performance, and has excellent cost performance, so it can be used in a wide range of applications from research and development to production. *Only sold in Japan

■Applications

Measurement of step (film thickness), roughness, waviness (stress), and shape of sample surface

■Features

・Wide vertical measurement range (up to 1,200μm) ・Excellent step measurement reproducibility (1σ=0.5nm/1μm step) ・Low stylus force measurement (0.03mg to 15mg) ・Color camera for observation (with 4X digital zoom) ・Keystone image correction function ・Φ140mm (Movement range: 80×20mm) Manual stage ・Space saving (body size: W250×D390mm)

  • Product

    Analysis and measurement equipment Thin film measurement Stylus type profiler Alpha-Step D-500/D-600

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1 Models of Analysis and measurement equipment Thin film measurement Stylus type profiler Alpha-Step D-500/D-600

Image Part Number Price (excluding tax) Power supply Needle pressure range Stylus tip radius Measurement length Step measurement reproducibility Dimensions (W×D×H)/Weight Vertical measurement resolution (maximum) Vertical measurement range (maximum) Profile data points Profile stitching Stress measurement Sample observation Sample thickness (maximum) Sample stage diameter Auto leveling Arc motion correction Θ stage XY stage movement range OS Apex 2D/3D analysis
Analysis and measurement equipment Thin film measurement Stylus type profiler Alpha-Step D-500/D-600-Part Number-Alpha-Step D-500

Alpha-Step D-500

Available upon quote

AC90-260V, 50/60Hz, 500VA

0.03~15mg

2μmR

30mm

1σ=0.5nm (1μm standard sample)

250×390×240mm/13.6kg (main unit measurement part only, PC/monitor etc. not included)

0.038nm (2.5μm range)

1,200μm

120,000

Standard

Options (2D stress)

Field of view 3.76 x 3.12mm, with 4X digital zoom, side view

20mm

140mm

Standard (soft)

Standard

360°, manual

80×20mm, manual

Windows7

Options: 2D

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About Company Handling This Product

Response Rate

100.0%


Response Time

125.8hrs

  • Japan

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