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  2. Analysis and measurement equipment Thin film measurement Stylus type profiler with automatic transport mechanism P-170 (ULVAC Sales Co., Ltd.)
Analysis and measurement equipment Thin film measurement Stylus type profiler with automatic transport mechanism P-170-P-170
Analysis and measurement equipment Thin film measurement Stylus type profiler with automatic transport mechanism P-170-ULVAC Sales Co., Ltd.

Analysis and measurement equipment Thin film measurement Stylus type profiler with automatic transport mechanism P-170
ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

125.8hours

About This Product

■Summary

P-170 is a model based on the proven P-17 with an automatic transport mechanism added. It is equipped as standard with a transfer robot, pre-aligner, automatic XY-θ stage, pattern recognition function, etc., so automatic measurement is possible just by placing the cassette. *Only sold in Japan Features

■Wafer automatic transfer mechanism

・Supports Φ200mm single open cassette ・Dual open cassette compatible (optional) ・Wafer transfer robot, non-contact pre-aligner ・Available for Φ75mm to Φ150mm (optional)

■Automatic measurement within the wafer surface

・High-precision automatic X-Y-θ stage adopted ・Measurement positions can be registered up to 1,000 sites ・Measurement position correction using pattern recognition function

  • Product

    Analysis and measurement equipment Thin film measurement Stylus type profiler with automatic transport mechanism P-170

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1 Models of Analysis and measurement equipment Thin film measurement Stylus type profiler with automatic transport mechanism P-170

Image Part Number Price (excluding tax)
Analysis and measurement equipment Thin film measurement Stylus type profiler with automatic transport mechanism P-170-Part Number-P-170

P-170

Available upon quote

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About Company Handling This Product

ULVAC Sales Co., Ltd.

Response Rate

100.0%

Response Time

125.8hrs

  • Japan

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