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Analysis and measurement equipment Thin film measurement Stylus type profiler P-7/P-17-P-7
Analysis and measurement equipment Thin film measurement Stylus type profiler P-7/P-17-ULVAC Sales Co., Ltd.

Analysis and measurement equipment Thin film measurement Stylus type profiler P-7/P-17
ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

125.8hours


About This Product

■Summary

P-7/P-17 is a stylus profiler manufactured by KLA-Tencor that has a variety of functions such as excellent measurement repeatability, long-distance measurement, and automatic sequencing. Various surface shapes can be evaluated quickly and with high accuracy. *Only sold in Japan

■Features

・Excellent step measurement reproducibility (1σ=0.4nm/1μm step) ・Automatic sequence measurement function (standard 20 sites, optional 1,000 sites) ・3 types of measuring heads (standard/low stylus force/extended range) ・Apex 2D analysis/report software ・Φ150mm electric stage ・Long distance measurement (maximum 150mm) ・Single view camera (selectable from top/side) ・2D stress/3D analysis software (optional)

  • Product

    Analysis and measurement equipment Thin film measurement Stylus type profiler P-7/P-17

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1 Models of Analysis and measurement equipment Thin film measurement Stylus type profiler P-7/P-17

Image Part Number Price (excluding tax) Power supply Needle pressure range Stylus tip radius Automatic sequence measurement Measurement length Step measurement reproducibility Dimensions (W×D×H)/Weight Vertical measurement resolution (maximum) Vertical measurement range (maximum) Profile data points Profile stitching Pattern recognition Stress measurement Sample observation Sample thickness (maximum) Sample stage diameter Auto leveling Θ stage XY stage movement range OS Apex 2D/3D analysis
Analysis and measurement equipment Thin film measurement Stylus type profiler P-7/P-17-Part Number-P-7

P-7

Available upon quote

AC90-230V, 50/60Hz, 500VA

0.5~50mg, option: 0.03~50mg (measurement range 131μm)

2μmR

20 sites, option: 1,000 sites

150mm

1σ=0.4nm (1μm standard sample)

570×670×430mm/80kg (main body measuring section only, not including PC/monitor)

0.001nm (6.5μm range)

327μm, option: 1,000μm

4,000,000

Standard

Option

Options: 2D stress

・Single view (select top or side)
・With 4X digital zoom
・Side view: Field of view 1.05×0.85mm
・Top view: Field of view 1.7×1.4mm

55mm

150mm

Standard

360°manual

Φ150mm electric programmable

Windows7

Standard 2D

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About Company Handling This Product

Response Rate

100.0%


Response Time

125.8hrs

  • Japan

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