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  4. High-speed spectroscopic ellipsometer UNECS-1M (built-in) (ULVAC Sales Co., Ltd.)
High-speed spectroscopic ellipsometer UNECS-1M (built-in)-UNECS-1M
High-speed spectroscopic ellipsometer UNECS-1M (built-in)-ULVAC Sales Co., Ltd.

High-speed spectroscopic ellipsometer UNECS-1M (built-in)
ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

125.8hours

About This Product

■Built-in type that can be integrated into various devices

The UNECS series is a spectroscopic ellipsometer that measures the thickness and refractive index of thin films at high speed and with high precision. A unique measurement method is used to achieve high-speed measurement and compactness. We offer a wide range of lineups to suit different applications, including unique portable types, automatic stage types, and built-in types compatible with vacuum environments. The UNECS-1M is a lightweight and compact sensor unit that can be easily incorporated into film deposition equipment. In addition to the normal atmospheric type, we also have a vacuum type that is compatible with vacuum environments.

■Applications

Measurement of film thickness, refractive index, and extinction coefficient of transparent or semitransparent thin films (oxide film, nitride film, resist, ITO, etc.) Features

■High-speed measurement:

By adopting a unique snapshot method, high-speed measurement of up to 20ms has been achieved.

■Visible spectrum compatible:

Wavelength range can be selected from standard type (530nm ~ 750nm) and visible spectroscopic type (380nm ~ 760nm).

■Compact sensor unit:

The light emitting/receiving sensor consists only of optical elements without a rotating mechanism, is extremely lightweight and compact, and does not require regular maintenance.

■A rich lineup:

We have a lineup for a variety of applications, including unique portable types, manual/automatic stage types, large substrate types, and built-in types that are compatible with atmospheric/vacuum environments.

  • Product

    High-speed spectroscopic ellipsometer UNECS-1M (built-in)

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1 Models of High-speed spectroscopic ellipsometer UNECS-1M (built-in)

Image Part Number Price (excluding tax) Installation environment Film thickness range Film thickness reproducibility Measurement time Wavelength range Equipment configuration Angle of incidence Spot diameter
High-speed spectroscopic ellipsometer UNECS-1M (built-in)-Part Number-UNECS-1M

UNECS-1M

Available upon quote

Atmosphere, vacuum (choose either)

1nm~2μm

1σ = 0.1nm

Light reception: 20ms ~ 3,000ms
Calculation: 300ms

530~750nm, 380~760nm (choose either)

Measuring head, control box, light source unit, instruction manual (CD), analysis software (CD)
*Control PC is not included in the specifications

70º fixed

Φ1mm, Φ0.3mm (choose either)

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About Company Handling This Product

ULVAC Sales Co., Ltd.

Response Rate

100.0%

Response Time

125.8hrs

  • Japan

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