High-speed spectroscopic ellipsometer UNECS-1M (built-in)
ULVAC Sales Co., Ltd.
About This Product
■Built-in type that can be integrated into various devices
The UNECS series is a spectroscopic ellipsometer that measures the thickness and refractive index of thin films at high speed and with high precision. A unique measurement method is used to achieve high-speed measurement and compactness. We offer a wide range of lineups to suit different applications, including unique portable types, automatic stage types, and built-in types compatible with vacuum environments.
The UNECS-1M is a lightweight and compact sensor unit that can be easily incorporated into film deposition equipment. In addition to the normal atmospheric type, we also have a vacuum type that is compatible with vacuum environments.
■Applications
Measurement of film thickness, refractive index, and extinction coefficient of transparent or semitransparent thin films (oxide film, nitride film, resist, ITO, etc.)
Features
■High-speed measurement:
By adopting a unique snapshot method, high-speed measurement of up to 20ms has been achieved.
■Visible spectrum compatible:
Wavelength range can be selected from standard type (530nm ~ 750nm) and visible spectroscopic type (380nm ~ 760nm).
■Compact sensor unit:
The light emitting/receiving sensor consists only of optical elements without a rotating mechanism, is extremely lightweight and compact, and does not require regular maintenance.
■A rich lineup:
We have a lineup for a variety of applications, including unique portable types, manual/automatic stage types, large substrate types, and built-in types that are compatible with atmospheric/vacuum environments.
-
Product
High-speed spectroscopic ellipsometer UNECS-1M (built-in)
-
Handling Company
ULVAC Sales Co., Ltd.
-
Categories
1 Models of High-speed spectroscopic ellipsometer UNECS-1M (built-in)
| Product Image | Part Number | Price (excluding tax) |
|---|---|---|
|
|
UNECS-1M |
Available upon quote |
Customers who viewed this product also viewed
Other products of ULVAC Sales Co., Ltd.
View more products of ULVAC Sales Co., Ltd.
About Company Handling This Product
- Japan