High-speed spectroscopic ellipsometer UNECS-1500A/2000A/3000A (automated stage)-UNECS-1500A

3000A (automated stage)
ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

125.8hours

About This Product

■Automatic stage type that allows mapping measurementThe UNECS series is a spectroscopic ellipsometer that measures the thickness and refractive index of thin films at high speed and with high precision. A unique measurement method is used to achieve high-speed measurement and compactness. We offer a wide range of lineups to suit different applications, including unique portable types, automatic stage types, and built-in types compatible with vacuum environments.

UNECS-1500A/2000A/3000A uses an automatic R-θ stage and autofocus function to quickly and automatically measure the film thickness distribution within the substrate surface and display the results on a color map.

■ApplicationsMeasurement of film thickness, refractive index, and extinction coefficient of transparent or semitransparent thin films (oxide film, nitride film, resist, ITO, etc.)

Features
■High-speed measurement:By adopting a unique snapshot method, high-speed measurement of up to 20ms has been achieved.

■Visible spectrum compatible:Wavelength range can be selected from standard type (530nm ~ 750nm) and visible spectroscopic type (380nm ~ 760nm).

■Compact sensor unit:The light emitting/receiving sensor consists only of optical elements without a rotating mechanism, is extremely lightweight and compact, and does not require regular maintenance.

■A rich lineup:We have a lineup for a variety of applications, including unique portable types, manual/automatic stage types, large substrate types, and built-in types that are compatible with atmospheric/vacuum environments.

Model
There is 1 model available for this product.

Product
High-speed spectroscopic ellipsometer UNECS-1500A/2000A/3000A (automated stage)

Handling Company
ULVAC Sales Co., Ltd.

Categories

Meters & Instruments

Ellipsometers

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1 Models of High-speed spectroscopic ellipsometer UNECS-1500A/2000A/3000A (automated stage)

Image	Part Number	Price (excluding tax)	Automatic measurement	Film thickness range	Film thickness reproducibility	Measurement time	Wavelength range	Equipment configuration	Control PC	Angle of incidence	Spot diameter	Stage
	UNECS-1500A	Available upon quote	200 points	1nm~2μm	1σ = 0.1nm	Light reception: 20ms ~ 3,000ms Calculation: 300ms	530~750nm, 380~760nm (choose either)	Measuring unit, controller, operating PC (notebook type), instruction manual (CD)	Notebook type (with operation/analysis software)	70º fixed	Φ1mm, Φ0.3mm (choose either)	Φ150mm automatic

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About Company Handling This Product

ULVAC Sales Co., Ltd.

Response Rate

100.0%

Response Time

125.8hrs

Japan

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High-speed spectroscopic ellipsometer UNECS-1500A/2000A/3000A (automated stage) ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.'s Response Status

About This Product

■Automatic stage type that allows mapping measurement

■Applications

■High-speed measurement:

■Visible spectrum compatible:

■Compact sensor unit:

■A rich lineup:

1 Models of High-speed spectroscopic ellipsometer UNECS-1500A/2000A/3000A (automated stage)

UNECS-1500A

Customers who viewed this product also viewed

Other products of ULVAC Sales Co., Ltd.

About Company Handling This Product

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High-speed spectroscopic ellipsometer UNECS-1500A/2000A/3000A (automated stage)
ULVAC Sales Co., Ltd.