High-speed spectroscopic ellipsometer UNECS-1500A/2000A/3000A (automated stage)
ULVAC Sales Co., Ltd.
About This Product
■Automatic stage type that allows mapping measurement
The UNECS series is a spectroscopic ellipsometer that measures the thickness and refractive index of thin films at high speed and with high precision. A unique measurement method is used to achieve high-speed measurement and compactness. We offer a wide range of lineups to suit different applications, including unique portable types, automatic stage types, and built-in types compatible with vacuum environments.
UNECS-1500A/2000A/3000A uses an automatic R-θ stage and autofocus function to quickly and automatically measure the film thickness distribution within the substrate surface and display the results on a color map.
■Applications
Measurement of film thickness, refractive index, and extinction coefficient of transparent or semitransparent thin films (oxide film, nitride film, resist, ITO, etc.)
Features
■High-speed measurement:
By adopting a unique snapshot method, high-speed measurement of up to 20ms has been achieved.
■Visible spectrum compatible:
Wavelength range can be selected from standard type (530nm ~ 750nm) and visible spectroscopic type (380nm ~ 760nm).
■Compact sensor unit:
The light emitting/receiving sensor consists only of optical elements without a rotating mechanism, is extremely lightweight and compact, and does not require regular maintenance.
■A rich lineup:
We have a lineup for a variety of applications, including unique portable types, manual/automatic stage types, large substrate types, and built-in types that are compatible with atmospheric/vacuum environments.
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Product
High-speed spectroscopic ellipsometer UNECS-1500A/2000A/3000A (automated stage)
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Handling Company
ULVAC Sales Co., Ltd.
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Categories
1 Models of High-speed spectroscopic ellipsometer UNECS-1500A/2000A/3000A (automated stage)
| Product Image | Part Number | Price (excluding tax) |
|---|---|---|
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UNECS-1500A |
Available upon quote |
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About Company Handling This Product
- Japan