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Analysis/Measurement Equipment Thin Film Measurement High Speed ​​Spectroscopic Ellipsometer UNECS-Portable (Portable)-UNECS-Portable
Analysis/Measurement Equipment Thin Film Measurement High Speed ​​Spectroscopic Ellipsometer UNECS-Portable (Portable)-ULVAC Sales Co., Ltd.

Analysis/Measurement Equipment Thin Film Measurement High Speed ​​Spectroscopic Ellipsometer UNECS-Portable (Portable)
ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

125.8hours


About This Product

■Lightweight and compact portable type

The UNECS series is a spectroscopic ellipsometer that measures the thickness and refractive index of thin films at high speed and with high precision. A unique measurement method is used to achieve high-speed measurement and compactness. We offer a wide range of lineups to suit different applications, including unique portable types, automatic stage types, and built-in types compatible with vacuum environments. UNECS-Portable is a portable type that is lightweight and compact with a measurement unit weighing only 2.2 kg, making it easy to carry. A simple fixed stage is included for small samples, and can be removed from the stage to measure large samples.

■Applications

Measurement of film thickness, refractive index, and extinction coefficient of transparent or semitransparent thin films (oxide film, nitride film, resist, ITO, etc.) Features

■High-speed measurement:

By adopting a unique snapshot method, high-speed measurement of up to 20ms has been achieved.

■Visible spectrum compatible:

Wavelength range can be selected from standard type (530nm ~ 750nm) and visible spectroscopic type (380nm ~ 760nm).

■Compact sensor unit:

The light emitting/receiving sensor consists only of optical elements without a rotating mechanism, is extremely lightweight and compact, and does not require regular maintenance.

■A rich lineup:

We have a lineup for a variety of applications, including unique portable types, manual/automatic stage types, large substrate types, and built-in types that are compatible with atmospheric/vacuum environments.

  • Product

    Analysis/Measurement Equipment Thin Film Measurement High Speed ​​Spectroscopic Ellipsometer UNECS-Portable (Portable)

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1 Models of Analysis/Measurement Equipment Thin Film Measurement High Speed ​​Spectroscopic Ellipsometer UNECS-Portable (Portable)

Image Part Number Price (excluding tax) Film thickness range Film thickness reproducibility Measurement time Wavelength range Equipment configuration Control PC Angle of incidence Spot diameter Stage
Analysis/Measurement Equipment Thin Film Measurement High Speed ​​Spectroscopic Ellipsometer UNECS-Portable (Portable)-Part Number-UNECS-Portable

UNECS-Portable

Available upon quote

1nm~2μm

1σ = 0.1nm

Light reception: 20ms ~ 3,000ms
Calculation: 300ms

530~750nm, 380~760nm (choose either)

Measurement body (with fixed stage), control box, light source unit
Operation PC (notebook type), instruction manual (CD)

Notebook type (with operation/analysis software)

70º fixed

Φ1mm, Φ0.3mm (choose either)

Fixed type (Φ150mm or less, removable)

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About Company Handling This Product

Response Rate

100.0%


Response Time

125.8hrs

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