Basic process gas monitor Qulee BGM series
ULVAC Sales Co., Ltd.
About This Product
■Summary
ULVAC's new residual gas analyzer (RGA) delivers revolutionary simplicity and ease of use. Introducing a new standard for process monitors based on the voices of equipment engineers on various production lines. Ideal for equipment management of vacuum evaporation equipment and various vacuum furnaces.
■Applications
・Residual gas analysis of film forming equipment such as vacuum evaporation equipment and sputtering equipment
・Residual gas analysis of high vacuum exhaust equipment
・Residual gas analysis of freeze drying equipment
・Various gas analysis for research and development
■Features
・Integrated display design...Can be measured without a computer
・Easy operation - One Click function...Easy for anyone. No complicated operations required
・Enhanced leak test function
・Capable of measuring total pressure
・Qulee QCS software is included as standard
・CE standard compatible
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Product
Basic process gas monitor Qulee BGM series
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Handling Company
ULVAC Sales Co., Ltd.
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Categories
1 Models of Basic process gas monitor Qulee BGM series
| Product Image | Part Number | Price (excluding tax) | Compatible standards | Detector | Mass number range | Mass separation method | Maximum baking temperature (when connected to sensor unit) | Maximum baking temperature (when sensor unit is removed) | Maximum working pressure | Minimum detection partial pressure | One Click feature | One Click leak check function | Operating temperature range | Power supply voltage | Resolution | Sensitivity | Software | Total pressure measurement function |
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BGM-101 |
Available upon quote | C.E. | Faraday cup | 1~100 amu | Quadrupole mass spectrometer | 120℃ | 250℃ | 1x10^-2Pa | 10^-8Pa | Yes/He/H2O/N2/O2/Any gas | Can be | 10~40℃ | DC24V±10%, 50W | M/△M=1M (10% P.H.) | 10^-7A/Pa | Qulee QCS Ver.3.0 or later (compatible with Windows XP/7) | Can be |
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About Company Handling This Product
- Japan