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Basic process gas monitor Qulee BGM series-BGM-101
Basic process gas monitor Qulee BGM series-ULVAC Sales Co., Ltd.

Basic process gas monitor Qulee BGM series
ULVAC Sales Co., Ltd.


About This Product

■Summary

ULVAC's new residual gas analyzer (RGA) delivers revolutionary simplicity and ease of use. Introducing a new standard for process monitors based on the voices of equipment engineers on various production lines. Ideal for equipment management of vacuum evaporation equipment and various vacuum furnaces.

■Applications

・Residual gas analysis of film forming equipment such as vacuum evaporation equipment and sputtering equipment ・Residual gas analysis of high vacuum exhaust equipment ・Residual gas analysis of freeze drying equipment ・Various gas analysis for research and development

■Features

・Integrated display design...Can be measured without a computer ・Easy operation - One Click function...Easy for anyone. No complicated operations required ・Enhanced leak test function ・Capable of measuring total pressure ・Qulee QCS software is included as standard ・CE standard compatible

  • Product

    Basic process gas monitor Qulee BGM series

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1 Models of Basic process gas monitor Qulee BGM series

Image Part Number Price (excluding tax) Power supply voltage Compatible standards Mass number range Mass separation method Detector Minimum detection partial pressure Maximum working pressure Maximum baking temperature (when sensor unit is removed) Maximum baking temperature (when connected to sensor unit) Sensitivity Resolution Total pressure measurement function Operating temperature range Software One Click feature One Click leak check function
Basic process gas monitor Qulee BGM series-Part Number-BGM-101

BGM-101

Available upon quote

DC24V±10%, 50W

C.E.

1~100 amu

Quadrupole mass spectrometer

Faraday cup

10^-8Pa

1x10^-2Pa

250℃

120℃

10^-7A/Pa

M/△M=1M (10% P.H.)

Can be

10~40℃

Qulee QCS Ver.3.0 or later (compatible with Windows XP/7)

Yes/He/H2O/N2/O2/Any gas

Can be

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