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Analysis/Measurement Equipment Vacuum Gauge Transducer Type SH200 Series SH200-A/R/E-SH200-A
Analysis/Measurement Equipment Vacuum Gauge Transducer Type SH200 Series SH200-A/R/E-ULVAC Sales Co., Ltd.

Analysis/Measurement Equipment Vacuum Gauge Transducer Type SH200 Series SH200-A/R/E
ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

125.8hours


About This Product

■Summary

This is a new series of transducer-type vacuum gauges "G-TRAN series multi-ion gauge" that can connect probes with different measurement ranges. This product, which is a B-A type ionization vacuum gauge, is capable of measuring ultra-high vacuum. While inheriting the traditional concepts of wide-range pressure measurement and low running costs, we have made improvements to make it more user-friendly.

■Applications

・For process control in high vacuum areas of various manufacturing equipment including semiconductors and electronic components ・For checking the ultimate pressure in high vacuum areas of various manufacturing equipment with many process chambers such as in-line type and single wafer type ・For pressure measurement in high vacuum and ultra-high vacuum equipment

■Features

・Gain probes with different measurement ranges can be connected: With the adoption of a multi-ion gauge, it is possible to select the probe according to the application. ・Compact: Significantly smaller than conventional products (controller volume reduced by 56%), world's smallest class ・Improved usability: Set point setting, status confirmation, etc. can be done by connecting to a PC/smartphone. ・Enriched lineup: In addition to analog output specification (SH200-A) and serial communication specification (SH200-R), EtherCAT specification (SH200-E) will be added. ・Filament life notification function: By monitoring the filament power, it is possible to notify the filament life in advance. ・Wide range of pressure measurement: Capable of measuring from atmospheric pressure to high vacuum area (1×10^+5 to 5×10^-8Pa) (when connecting optional unit SWU10-R) ・Accurate atmospheric pressure measurement: Atmospheric pressure can be checked for chamber opening (when optional unit SAU is connected)

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    Analysis/Measurement Equipment Vacuum Gauge Transducer Type SH200 Series SH200-A/R/E

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1 Models of Analysis/Measurement Equipment Vacuum Gauge Transducer Type SH200 Series SH200-A/R/E

Image Part Number Price (excluding tax) Power supply voltage Adaptable multi-ion gauge sensor Compatible standards Mass Repeatability (N2) Measured value output Update time Connectable sensors External dimensions W×D×H Control output signal Control input signal Input/output connector Storage temperature Operating humidity range Operating temperature range Specification Sensor pressure resistance Sensor internal volume Sampling time Options Atmospheric pressure sensor Options unit cable Options Multi-ion gauge sensor Others Options Multi-ion gauge sensor Options Pirani gauge sensor material Options Pirani gauge sensor Options Pirani gauge Emission current LED display IP protection class DEGAS
Analysis/Measurement Equipment Vacuum Gauge Transducer Type SH200 Series SH200-A/R/E-Part Number-SH200-A

SH200-A

Available upon quote

DC20~28V (ripple, noise 1% or less), 8W or less

M-44 (NW16), M-45 (NW25), M-46 (ICF070)

C.E.

Controller: Approx. 280g
Measuring head (M-44, M-45): 80g, (M-46): 300g

SH200 single mode: ±2%

Output voltage: DC 0~10V
LOG output: 0.75V/1 digit
Pressure conversion formula: V=7.25+0.75× (LogP-2) P=10^{ (V-7.25) /0.75+2}

60msec

Multi-ion gauge sensor: 1 piece
Pirani gauge SWU10-R: 1 piece (optional)
Atmospheric pressure sensor SAU: 1 (optional)

69mm×63mm×90mm (controller part)

Sensor error, setpoint 1/2/3, emission valid, filament power monitoring
Rating: 24VMAX, 50mAMAX, saturation voltage 1V

FIL ON/OFF, FIL 1/2, DEGAS ON/OFF
Operates with open collector input, negative logic
*How to use the FIL ON/OFF signal differs depending on the mode.

D-sub15 pin (M2.6 screw)

-20~65℃ (No condensation when not energized)

15~80% (no condensation)

10~50℃

Standard specifications

2×10^+5Pa (absolute pressure) *The pressure resistance of flanges, clamps, etc. must be considered separately.

17cm3 (M-44), 19cm3 (M-45), 17cm3 (M-46)

60ms 5 times moving average processing

SAU (NW16)
Material: SUS316L

GUC-200P (for SWU): 0.5m, 1m, 2m
GUC-200A (for SAU): 0.5m, 1m, 2m

PtC-Mo, SUS304, W, Kovar glass, Kovar/Ni plating

M-44 (NW16), M-45 (NW25), M-46 (ICF070)
Material: Filament: Ir/Y2O3 coat

Filament - Pt, Others - BS/Ni, Plating, Ni, Solder

SWP-16 (NW16) , SWP-25 (NW25) , SWP-R1/8 (R1/8) , SWP-P18 (Φ18 pipe end) , SWP-P15 (Φ15 pipe end)

SWU10-R *Also compatible with conventional SPU

1mA (1×10^-3Pa or less), 10μA (1×10^-3Pa or more)

POWER/ERROR: Power, error LED (blinking status changes depending on each mode)
SET1: Set point 1LED
SET2: Set point 2LED
SET3: Set point 3LED

IP30

Electron bombardment method (electron bombardment) 1mA, 330V

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About Company Handling This Product

Response Rate

100.0%


Response Time

125.8hrs

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