Analysis/Measurement Equipment Vacuum Gauge Transducer Type ST200 Series ST200-A/R/E
ULVAC Sales Co., Ltd.
About This Product
■Summary
This is a new series of transducer type "G-TRAN series multi-ion gauge" that can connect probes with different measurement ranges. This product, which is a triode type ionization vacuum gauge, is less likely to lose sensitivity and is capable of longer and more accurate vacuum measurements even in harsh environments for vacuum gauges. While inheriting the conventional concept of long life and low running costs, we have made improvements to make it more user-friendly.
■Applications
・For confirmation of ultimate pressure and process management of manufacturing equipment such as organic EL and touch panels
・For checking the ultimate pressure of various industrial vacuum devices such as vacuum furnaces
・For measurements in an atmosphere with a lot of hydrocarbons (oil-based)
・For measurement in an atmosphere where cutting oil or cleaning fluid remains during vacuum parts processing.
・For vacuum equipment that aims to reduce the frequency of replacing vacuum gauge probes.
*Please contact us when using in a corrosive gas (halogen gas) atmosphere.
■Features
・Gain probes with different measurement ranges can be connected: With the adoption of a multi-ion gauge, it is possible to select the probe according to the application.
・Compact: Significantly smaller than conventional products (controller volume reduced by 56%), world's smallest class
・Improved usability: Set point setting, status confirmation, etc. can be done by connecting to a PC/smartphone.
・Enriched lineup: In addition to analog output specification (ST200-A) and serial communication specification (ST200-R), EtherCAT specification (ST200-E) will be added.
・World's first triode metal ionization vacuum gauge (patent pending): Achieves long life even under harsh environments for vacuum gauges
・Filament life notification function: By monitoring the filament power, it is possible to notify the filament life in advance.
・Wide range of pressure measurement: Capable of measuring from atmospheric pressure to high vacuum region (1×10^+5 to 1×10^-5Pa) (when connecting optional unit SWU10-R)
・Accurate atmospheric pressure measurement: Atmospheric pressure can be checked for chamber opening (when optional unit SAU is connected)
■Each mode specifications
ST200-A/ST200-R/ST200-E can be used in three ways: multi-oin gauge standalone mode, combination mode with Pirani gauge, and triple combination mode with Pirani gauge and atmospheric pressure sensor.
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Product
Analysis/Measurement Equipment Vacuum Gauge Transducer Type ST200 Series ST200-A/R/E
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Handling Company
ULVAC Sales Co., Ltd.
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Categories
1 Models of Analysis/Measurement Equipment Vacuum Gauge Transducer Type ST200 Series ST200-A/R/E
| Product Image | Part Number | Price (excluding tax) | Adaptable multi-ion gauge sensor | Compatible standards | Connectable sensors | Control input signal | Control output signal | DEGAS | Emission current | External dimensions W×D×H | IP protection class | Input/output connector | LED display | Mass | Measured value output | Operating humidity range | Operating temperature range | Optional display unit | Options Atmospheric pressure sensor | Options Multi-ion gauge sensor | Options Pirani gauge | Options Pirani gauge sensor | Options Pirani gauge sensor material | Options unit cable | Power supply voltage | Repeatability (N2) | Sampling time | Sensor internal volume | Sensor pressure resistance | Specification | Storage temperature | Update time |
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ST200-A |
Available upon quote | SWT-16 (NW16), SWT-25 (NW25) | C.E. |
Multi-ion gauge sensor: 1 piece Pirani gauge SWU10-R: 1 piece (optional) Atmospheric pressure sensor SAU: 1 (optional) |
FIL ON/OFF, FIL 1/2, DEGAS ON/OFF Operates with open collector input, negative logic |
Sensor error, setpoint 1/2/3, emission valid, filament power monitoring Rating: 24VMAX, 50mA MAX, saturation voltage 1V |
Electron bombardment method, emission current 2mA, grid voltage approximately 330V | 2mA (1×10^-2Pa or less), 10μA (1×10^-2Pa or more) | 69mm×63mm×90mm (controller part) | IP30 | D-sub15 pin (M2.6 screw) | POWER/ERROR: Power, error LED (blinking status changes depending on each mode) |
Controller: Approx. 280g Measuring head (SWT-16, SWT-25): 80g |
Output voltage: DC 0~10V LOG output: 0.75V/1 digit Pressure conversion formula: V=7.25+0.75× (LogP-2) P=10^{ (V-7.25) /0.75+2} |
15~80% (no condensation) | 10~50℃ | 1CH: ISG1 (using DC24V power supply) |
SAU (NW16) Material: SUS316L |
SWT-16 (NW16), SWT-25 (NW25) Material: Filament: Ir/Y2O3 coat Others: PtC-Mo, SUS304, W, Kovar glass, Kovar/Ni plating |
SWU10-R *Also compatible with conventional SPU | SWP-16 (NW16), SWP-25 (NW25), SWP-R1/8 (R1/8), SWP-P18 (Φ18 pipe end), SWP-P15 (Φ15 pipe end), etc. | Filament - Pt, Others - BS/Ni, Plating, Ni, Solder |
GUC-200P (for SWU): 0.5m, 1m, 2m GUC-200A (for SAU): 0.5m, 1m, 2m |
DC20~28V (ripple, noise 1% or less) 8W or less |
ST200 single mode: ±2% | 60ms 5 times moving average processing | 17cm3 (SWT-16), 19cm3 (SWT-25) | 2×10^+5Pa (absolute pressure) *The pressure resistance of flanges, clamps, etc. must be considered separately. | Standard specifications | -20~65℃ (No condensation when not energized) | 60msec |
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About Company Handling This Product
- Japan