Analysis/Measurement Equipment Vacuum Gauge Transducer Type ST200 Series ST200-A/R/E-ST200-A

E
ULVAC Sales Co., Ltd.

About This Product

■SummaryThis is a new series of transducer type "G-TRAN series multi-ion gauge" that can connect probes with different measurement ranges. This product, which is a triode type ionization vacuum gauge, is less likely to lose sensitivity and is capable of longer and more accurate vacuum measurements even in harsh environments for vacuum gauges. While inheriting the conventional concept of long life and low running costs, we have made improvements to make it more user-friendly.

■Applications・For confirmation of ultimate pressure and process management of manufacturing equipment such as organic EL and touch panels
・For checking the ultimate pressure of various industrial vacuum devices such as vacuum furnaces
・For measurements in an atmosphere with a lot of hydrocarbons (oil-based)
・For measurement in an atmosphere where cutting oil or cleaning fluid remains during vacuum parts processing.
・For vacuum equipment that aims to reduce the frequency of replacing vacuum gauge probes.

*Please contact us when using in a corrosive gas (halogen gas) atmosphere.

■Features・Gain probes with different measurement ranges can be connected: With the adoption of a multi-ion gauge, it is possible to select the probe according to the application.
・Compact: Significantly smaller than conventional products (controller volume reduced by 56%), world's smallest class
・Improved usability: Set point setting, status confirmation, etc. can be done by connecting to a PC/smartphone.
・Enriched lineup: In addition to analog output specification (ST200-A) and serial communication specification (ST200-R), EtherCAT specification (ST200-E) will be added.
・World's first triode metal ionization vacuum gauge (patent pending): Achieves long life even under harsh environments for vacuum gauges
・Filament life notification function: By monitoring the filament power, it is possible to notify the filament life in advance.
・Wide range of pressure measurement: Capable of measuring from atmospheric pressure to high vacuum region (1×10^+5 to 1×10^-5Pa) (when connecting optional unit SWU10-R)
・Accurate atmospheric pressure measurement: Atmospheric pressure can be checked for chamber opening (when optional unit SAU is connected)

■Each mode specificationsST200-A/ST200-R/ST200-E can be used in three ways: multi-oin gauge standalone mode, combination mode with Pirani gauge, and triple combination mode with Pirani gauge and atmospheric pressure sensor.

Model
There is 1 model available for this product.

Product
Analysis/Measurement Equipment Vacuum Gauge Transducer Type ST200 Series ST200-A/R/E

Handling Company
ULVAC Sales Co., Ltd.

Categories

Meters & Instruments

Vacuum Gauges

140+ people viewing

Last viewed: 4 hours ago

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1 Models of Analysis/Measurement Equipment Vacuum Gauge Transducer Type ST200 Series ST200-A/R/E

Image	Part Number	Price (excluding tax)	Power supply voltage	Adaptable multi-ion gauge sensor	Compatible standards	Mass	Repeatability (N2)	Measured value output	Update time	Connectable sensors	External dimensions W×D×H	Control output signal	Control input signal	Input/output connector	Storage temperature	Operating humidity range	Operating temperature range	Specification	Sensor pressure resistance	Sensor internal volume	Sampling time	Options Atmospheric pressure sensor	Options unit cable	Options Multi-ion gauge sensor	Options Pirani gauge sensor material	Options Pirani gauge sensor	Options Pirani gauge	Optional display unit	Emission current	LED display	IP protection class	DEGAS
	ST200-A	Available upon quote	DC20~28V (ripple, noise 1% or less) 8W or less	SWT-16 (NW16), SWT-25 (NW25)	C.E.	Controller: Approx. 280g Measuring head (SWT-16, SWT-25): 80g	ST200 single mode: ±2%	Output voltage: DC 0~10V LOG output: 0.75V/1 digit Pressure conversion formula: V=7.25+0.75× (LogP-2) P=10^{ (V-7.25) /0.75+2}	60msec	Multi-ion gauge sensor: 1 piece Pirani gauge SWU10-R: 1 piece (optional) Atmospheric pressure sensor SAU: 1 (optional)	69mm×63mm×90mm (controller part)	Sensor error, setpoint 1/2/3, emission valid, filament power monitoring Rating: 24VMAX, 50mA MAX, saturation voltage 1V	FIL ON/OFF, FIL 1/2, DEGAS ON/OFF Operates with open collector input, negative logic	D-sub15 pin (M2.6 screw)	-20~65℃ (No condensation when not energized)	15~80% (no condensation)	10~50℃	Standard specifications	2×10^+5Pa (absolute pressure) *The pressure resistance of flanges, clamps, etc. must be considered separately.	17cm3 (SWT-16), 19cm3 (SWT-25)	60ms 5 times moving average processing	SAU (NW16) Material: SUS316L	GUC-200P (for SWU): 0.5m, 1m, 2m GUC-200A (for SAU): 0.5m, 1m, 2m	SWT-16 (NW16), SWT-25 (NW25) Material: Filament: Ir/Y2O3 coat Others: PtC-Mo, SUS304, W, Kovar glass, Kovar/Ni plating	Filament - Pt, Others - BS/Ni, Plating, Ni, Solder	SWP-16 (NW16), SWP-25 (NW25), SWP-R1/8 (R1/8), SWP-P18 (Φ18 pipe end), SWP-P15 (Φ15 pipe end), etc.	SWU10-R *Also compatible with conventional SPU	1CH: ISG1 (using DC24V power supply)	2mA (1×10^-2Pa or less), 10μA (1×10^-2Pa or more)	POWER/ERROR: Power, error LED (blinking status changes depending on each mode)	IP30	Electron bombardment method, emission current 2mA, grid voltage approximately 330V

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About Company Handling This Product

ULVAC Sales Co., Ltd.

Japan

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Analysis/Measurement Equipment Vacuum Gauge Transducer Type ST200 Series ST200-A/R/E ULVAC Sales Co., Ltd.

About This Product

■Summary

■Applications

■Features

■Each mode specifications

1 Models of Analysis/Measurement Equipment Vacuum Gauge Transducer Type ST200 Series ST200-A/R/E

ST200-A

Customers who viewed this product also viewed

Other products of ULVAC Sales Co., Ltd.

About Company Handling This Product

Related search keywords

Analysis/Measurement Equipment Vacuum Gauge Transducer Type ST200 Series ST200-A/R/E
ULVAC Sales Co., Ltd.