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Analysis/Measurement Equipment Vacuum Gauge Transducer Type Ceramic Capacitance Manometer CCMT-D Series-CCMT-1000D
Analysis/Measurement Equipment Vacuum Gauge Transducer Type Ceramic Capacitance Manometer CCMT-D Series-ULVAC Sales Co., Ltd.

Analysis/Measurement Equipment Vacuum Gauge Transducer Type Ceramic Capacitance Manometer CCMT-D Series
ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

125.8hours


About This Product

■Summary

The CCMT-D series is a capacitance manometer whose ceramic diaphragm deforms due to changes in gas pressure and detects pressure from the capacitance that changes accordingly. The sensor part has an integrated structure made of ceramic, so it has excellent reproducibility and stability, and can accurately measure pressure in low and medium vacuum regions regardless of the type of gas (absolute pressure gauge).

■Applications

・For pressure monitoring during the process of film deposition equipment ・For pressure monitoring of vacuum exhaust systems such as vacuum melting and vacuum heat treatment furnaces. ・For pressure monitors of various manufacturing equipment such as solar cells

■Features

・Stable productability over a long period of time ・Excellent corrosion resistance due to the use of ceramic membrane ・Built-in temperature compensation circuit type ・Newly adopted structure that protects the sensor from dirt ・0 point adjustment possible with push button

  • Product

    Analysis/Measurement Equipment Vacuum Gauge Transducer Type Ceramic Capacitance Manometer CCMT-D Series

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1 Models of Analysis/Measurement Equipment Vacuum Gauge Transducer Type Ceramic Capacitance Manometer CCMT-D Series

Image Part Number Price (excluding tax) Mass Accuracy Measurement full scale Temperature compensation Temperature coefficient Zero voltage Temperature coefficient Span voltage Gas contact material Response speed External dimensions Resolution Output Input power Input/output connector Operating temperature range Fitting
Analysis/Measurement Equipment Vacuum Gauge Transducer Type Ceramic Capacitance Manometer CCMT-D Series-Part Number-CCMT-1000D

CCMT-1000D

Available upon quote

329g (diameter 12.7/standard type)

±0.2% of indicated value ±temperature coefficient

133kPa F.S.

Built-in temperature compensation circuit

0.005% F.S./℃

0.01% R/℃

Al2O3, Vacon70, SUS316

30ms or less

Diameter 55mm x 117mm (diameter 12.7mm, standard type)

0.003% for full case

DC 0~10VF.S

DC 14~30V, 1W

D-sub 15 pin male

10~50℃

Standard: diameter 12.7 pipe
Options: NW16KF, Cajon 8VCR

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About Company Handling This Product

Response Rate

100.0%


Response Time

125.8hrs

  • Japan

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