Analysis/Measurement Equipment Vacuum Gauge Transducer Type Ceramic Capacitance Manometer CCMT-D Series
ULVAC Sales Co., Ltd.
About This Product
■Summary
The CCMT-D series is a capacitance manometer whose ceramic diaphragm deforms due to changes in gas pressure and detects pressure from the capacitance that changes accordingly. The sensor part has an integrated structure made of ceramic, so it has excellent reproducibility and stability, and can accurately measure pressure in low and medium vacuum regions regardless of the type of gas (absolute pressure gauge).
■Applications
・For pressure monitoring during the process of film deposition equipment
・For pressure monitoring of vacuum exhaust systems such as vacuum melting and vacuum heat treatment furnaces.
・For pressure monitors of various manufacturing equipment such as solar cells
■Features
・Stable productability over a long period of time
・Excellent corrosion resistance due to the use of ceramic membrane
・Built-in temperature compensation circuit type
・Newly adopted structure that protects the sensor from dirt
・0 point adjustment possible with push button
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Product
Analysis/Measurement Equipment Vacuum Gauge Transducer Type Ceramic Capacitance Manometer CCMT-D Series
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Handling Company
ULVAC Sales Co., Ltd.
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Categories
1 Models of Analysis/Measurement Equipment Vacuum Gauge Transducer Type Ceramic Capacitance Manometer CCMT-D Series
| Product Image | Part Number | Price (excluding tax) | Accuracy | External dimensions | Fitting | Gas contact material | Input power | Input/output connector | Mass | Measurement full scale | Operating temperature range | Output | Resolution | Response speed | Temperature coefficient Span voltage | Temperature coefficient Zero voltage | Temperature compensation |
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CCMT-1000D |
Available upon quote | ±0.2% of indicated value ±temperature coefficient | Diameter 55mm x 117mm (diameter 12.7mm, standard type) |
Standard: diameter 12.7 pipe Options: NW16KF, Cajon 8VCR |
Al2O3, Vacon70, SUS316 | DC 14~30V, 1W | D-sub 15 pin male | 329g (diameter 12.7/standard type) | 133kPa F.S. | 10~50℃ | DC 0~10VF.S | 0.003% for full case | 30ms or less | 0.01% R/℃ | 0.005% F.S./℃ | Built-in temperature compensation circuit |
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About Company Handling This Product
- Japan