Product
High vacuum exhaust system DEPOX VFR-200M/XHandling Company
ULVAC Sales Co., Ltd.Categories
Product Image | Part Number | Price (excluding tax) | Auxiliary pump | Auxiliary valve | Earth terminal | Intake port | Main pump | Main valve | Mass | Maximum dimensions (W width x D depth x H height) | Required amount of electricity | Scramble | Ultimate pressure |
---|---|---|---|---|---|---|---|---|---|---|---|---|---|
VFR-200M/X |
Available upon quote | Oil rotary vacuum pump 100 L/min | Three way valve | Class D (ground resistance value/100MΩ or less) | VG-65 | Oil diffusion pump (air cooling) 200 L/sec | 65A butterfly valve | 120.7kg | 730mm (W) ×584mm (D) ×804mm (H) | Single phase 100V 1.4kVA | Vinyl captire cable (with R3.5-4 crimp terminal) 4m |
10^-4Pa level 10^-5Pa (when using liquid nitrogen) |