Product
High vacuum exhaust system DEPOX VTS-350M/XHandling Company
ULVAC Sales Co., Ltd.Categories
Product Image | Part Number | Price (excluding tax) | Auxiliary pump | Auxiliary valve | Earth terminal | Intake port | Main pump | Main valve | Mass | Maximum dimensions (W width x D depth x H height) | Required amount of electricity | Scramble | Ultimate pressure |
---|---|---|---|---|---|---|---|---|---|---|---|---|---|
VTS-350M/X |
Available upon quote | Scroll pump 250 L/min | Three way valve | Class D (ground resistance value/100MΩ or less) | VG-100 | Turbo molecular pump 345 L/sec | 100A butterfly valve | 135kg | 730mm (W) ×584mm (D) ×804mm (H) | Single phase 100V 0.9kVA | Vinyl captire cable (with R3.5-4 crimp terminal) 4m |
10^-4Pa level 10^-5Pa (when using liquid nitrogen) |