Turbo molecular pump exhaust device VPT VPT-060
ULVAC Sales Co., Ltd.
About This Product
■Summary
Turbo molecular pump (60L/sec) + dry vacuum pump. Ultimate pressure 10^-5Pa class. This is a small, dry type high vacuum pumping device that compactly includes necessary equipment such as a turbo molecular pump, dry vacuum pump, valve piping, and electrical system inside the base frame. Ideal for clean vacuum environments in various fields such as semiconductors, analysis, inspection, physics and chemistry, and pharmaceuticals.
■Features
・Completely dry exhaust unit.
- Compact installation space.
・RoHS compliant
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Product
Turbo molecular pump exhaust device VPT VPT-060
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Handling Company
ULVAC Sales Co., Ltd.
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Categories
1 Models of Turbo molecular pump exhaust device VPT VPT-060
| Product Image | Part Number | Price (excluding tax) | Auxiliary pump | Earth terminal | Intake port | Main pump | Mass | Maximum dimensions (W width x D depth x H height) | Required amount of electricity | Scramble | Ultimate pressure |
|---|---|---|---|---|---|---|---|---|---|---|---|
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VPT-060 |
Available upon quote | Diaphragm dry vacuum pump 20 L/min | Class D (ground resistance value/100MΩ or less) | ISO63 (Option: KF-40) | Turbo molecular pump (air cooling) 60L/sec | 17kg | 340mm (W) ×340mm (D) ×355mm (H) | Single phase 100V 0.3kVA | Vinyl captire cable (with plug) 2m | 10^-5 Pa level |
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About Company Handling This Product
- Japan