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  2. Purification Equipment
  3. Exhaust Systems
  4. Turbo molecular pump exhaust device VPT VPT-060 (ULVAC Sales Co., Ltd.)
Turbo molecular pump exhaust device VPT VPT-060-VPT-060
Turbo molecular pump exhaust device VPT VPT-060-ULVAC Sales Co., Ltd.

Turbo molecular pump exhaust device VPT VPT-060
ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

125.8hours

About This Product

■Summary

Turbo molecular pump (60L/sec) + dry vacuum pump. Ultimate pressure 10^-5Pa class. This is a small, dry type high vacuum pumping device that compactly includes necessary equipment such as a turbo molecular pump, dry vacuum pump, valve piping, and electrical system inside the base frame. Ideal for clean vacuum environments in various fields such as semiconductors, analysis, inspection, physics and chemistry, and pharmaceuticals.

■Features

・Completely dry exhaust unit. - Compact installation space. ・RoHS compliant

  • Product

    Turbo molecular pump exhaust device VPT VPT-060

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1 Models of Turbo molecular pump exhaust device VPT VPT-060

Image Part Number Price (excluding tax) Mass Auxiliary pump Maximum dimensions (W width x D depth x H height) Required amount of electricity Intake port Scramble Ultimate pressure Main pump Earth terminal
Turbo molecular pump exhaust device VPT VPT-060-Part Number-VPT-060

VPT-060

Available upon quote

17kg

Diaphragm dry vacuum pump 20 L/min

340mm (W) ×340mm (D) ×355mm (H)

Single phase 100V 0.3kVA

ISO63 (Option: KF-40)

Vinyl captire cable (with plug) 2m

10^-5 Pa level

Turbo molecular pump (air cooling) 60L/sec

Class D (ground resistance value/100MΩ or less)

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About Company Handling This Product

ULVAC Sales Co., Ltd.

Response Rate

100.0%

Response Time

125.8hrs

  • Japan

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Exhaust Systems
Exhaust Systems　ULVAC Sales Co., Ltd.
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