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  4. Rapid room temperature regeneration cryopump (ULVAC Sales Co., Ltd.)
Rapid room temperature regeneration cryopump-Rapid room temperature regeneration cryopump
Rapid room temperature regeneration cryopump-ULVAC Sales Co., Ltd.

Rapid room temperature regeneration cryopump
ULVAC Sales Co., Ltd.

About This Product

■Summary

The Super Trap, which uses a helium refrigerator, greatly increases the speed at which moisture is pumped out, contributing to improved equipment availability. The refrigerant used is an environmentally friendly product with a low global warming potential.

■Applications

・Ideal for batch-type equipment with high moisture content, optical film-forming equipment, etc. ・Applicable to all vacuum equipment

■Features

・Helium gas is used as the refrigerant. No Freon gas required. ・Cooling and heating are completed in a short time. (Within 5-15 minutes, depending on specifications) ・Lightweight, compact, and easy to install. (The installation space for a floor-standing unit is about one-third that of a fluorocarbon trap)

  • Product

    Rapid room temperature regeneration cryopump

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1 Models of Rapid room temperature regeneration cryopump

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Rapid room temperature regeneration cryopump-Part Number-Rapid room temperature regeneration cryopump

Rapid room temperature regeneration cryopump

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ULVAC Sales Co., Ltd.

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