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  4. Cryopump CRYO-U series Special cryopump (ULVAC Sales Co., Ltd.)
Cryopump CRYO-U series Special cryopump-CRYO-U8HL
Cryopump CRYO-U series Special cryopump-ULVAC Sales Co., Ltd.

Cryopump CRYO-U series Special cryopump
ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

125.8hours

About This Product

■Summary

To save space, we use L-type pumps that are lower in height, and multi-systems that operate multiple pumps with one compressor.

■Bakeable type

Ideal for extremely high vacuum. A bakeable type cryopump can easily achieve an extremely high vacuum of 10-8Pa or less by heating the pump wall to 150℃ to 200℃. (Models other than CTI products can be manufactured as bakeable types.)

■Super trap

Exclusively for water exhaust. This is a cryogenic trap using a single-stage refrigerator. LN2 is not required, and it is advantageous in terms of labor and cost. We can design and manufacture according to your application.

■L type

Contributes to making the device more compact. The height dimension is minimized by installing the refrigerator unit from the side. (Models other than CTI products can be manufactured as L-type.)

  • Product

    Cryopump CRYO-U series Special cryopump

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1 Models of Cryopump CRYO-U series Special cryopump

Image Part Number Price (excluding tax) Mass Maximum flow rate Pumping speed (20℃) Exhaust capacity Intake flange Ultimate pressure Cooling down time (power cycle)
Cryopump CRYO-U series Special cryopump-Part Number-CRYO-U8HL

CRYO-U8HL

Available upon quote

20 kg

Argon: 1.2×10^3 Pa・L/s
Hydrogen: 1.6×10^2 Pa・L/s

Nitrogen: 1,500L/s
Hydrogen: 2,200L/s
Argon: 1,200L/s
Water: 4,000L/s

Argon: 1.6×10^8 Pa・L
Hydrogen: 1.2×10^6 Pa・L

UVG200

10^-7 Pa

50Hz: 100min
60Hz: 90min

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About Company Handling This Product

ULVAC Sales Co., Ltd.

Response Rate

100.0%

Response Time

125.8hrs

  • Japan

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